AM REPORT 4/09/03

eddy vilanova at snf.stanford.edu
Wed Apr 9 08:06:27 PDT 2003




>
> >                      Litho Equipment Status Report
> >                                 04/09/03
> >
> > AFM1.......................
> > AFM2.......................
> > BLUE M...................
> > DEKTAK CLEAN....
> > DEKTAK Au............
> > ELLIPSOMETER.....
> > ELP1.........................
> > ELP2.........................
> > EV ALIGN................
> > EV BONDER............
> > LAUREL...................
> > HEADWAY2.............
> > KARLSUSS...............
> > KARLSUSS2............. Problem -  Waiting for BSA motor.
> > KS BONDER.............
> > LITHOSOLV.............
> > MASKSCRUB...........
> > NANO1......................
> > NANO2......................
> > NIKON......................
> > R2T2.......................... Shutdown - Won't Measure
> > SVGCOAT.................
> > SVGCOAT2...............
> > SVGDEV....................
> > SVGDEV2..................
> > ULTRATECH............
> > ULTRATECH2..........
> > UVCURE...................
> > WBMISCRES............
> > YES OVEN................
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