Litho AM Report 2/13/03

eddy vilanova at snf.stanford.edu
Fri Feb 14 08:17:00 PST 2003



> >
> > >                      Litho Equipment Status Report
> > >                                 02/14/03
> > >
> > > AFM1.......................
> > > AFM2.......................Problem - Computer been Rebuilt.
> > > BLUE M...................
> > > DEKTAK CLEAN....
> > > DEKTAK Au............
> > > ELLIPSOMETER.....
> > > ELP1.........................
> > > ELP2.........................
> > > EV ALIGN................
> > > EV BONDER.............
> > > LAUREL...................
> > > HEADWAY2.............
> > > KARLSUSS...............
> > > KARLSUSS2............. Problem - Waiting For BSA Motor.
> > > KS BONDER.............
> > > LITHOSOLV.............
> > > MASKSCRUB...........
> > > NANO1......................
> > > NANO2......................
> > > NIKON......................
> > > RT2.........................     ShutDown - Measurement Problem
>
> > SVGCOAT.................
> > > SVGCOAT2...............
> > > SVGDEV....................
> > > SVGDEV2..................
> > > ULTRATECH............
> > > ULTRATECH2..........
> > > UVCURE...................
> > > WBMISCRES............
> > > YES OVEN................
> >
> > >
> > >
> >
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