From martinez at snf.stanford.edu Thu Jan 2 16:13:00 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Thu, 02 Jan 2003 16:13:00 -0800 Subject: litho equipment status 1/2/03 References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3E14D58B.6F7918CA@snf.stanford.edu> > > > Litho Equipment Status Report > 1/2/03 > > AFM1.......................up > AFM2.......................up > BLUE M...................service mode & program mode disabled on > controller. profile entry enabled > DEKTAK CLEAN....up > DEKTAK Au............up > ELLIPSOMETER.....up > ELP1.........................up > ELP2.........................up > EV ALIGN................lamp cal, 7mw/cm2 CI mode > EV BONDER.............up > LAUREL...................up > HEADWAY2.............up > KARLSUSS...............shutdown > KARLSUSS2.............up > KS BONDER.............not available > LITHOSOLV.............up > MASKSCRUB...........up > NANO1......................up > NANO2......................up > NIKON......................up > R2T2..........................up > SVGCOAT.................hot plates calibrated. temp reading on > controller do not match ref probe > SVGCOAT2...............up > SVGDEV....................up > SVGDEV2..................hot plate calibrated. temp readings on > controller do not match ref probe > ULTRATECH............up > ULTRATECH2..........up > UVCURE...................up > WBMISCRES............up > YES OVEN................up > > SVG COAT TRACK 1 VP HOT PLATE 123 DEGREES, POST BAKE 89 DEGREES SVG DEVELOP TRACK 2 HOT PLATE 108 DEGREES -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Fri Jan 3 08:16:58 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Fri, 03 Jan 2003 08:16:58 -0800 Subject: litho a.m. report 1/3/03 References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3E15B77A.468F7AD9@snf.stanford.edu> > > > Litho Equipment Status Report > 1/3/03 > > AFM1....................... > AFM2....................... > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ > EV BONDER............. > LAUREL................... > HEADWAY2............. > KARLSUSS...............shutdown > KARLSUSS2............. > KS BONDER............. > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT................. > SVGCOAT2............... > SVGDEV.................... > SVGDEV2.................. > ULTRATECH............ > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Mon Jan 6 08:42:17 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Mon, 06 Jan 2003 08:42:17 -0800 Subject: litho a.m. report 1/6/03 References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3E19B1E9.5D809177@snf.stanford.edu> > > > Litho Equipment Status Report > 1/6/03 > > AFM1....................... > AFM2....................... > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ > EV BONDER.............problem. megasonic cleaner not working > LAUREL................... > HEADWAY2............. > KARLSUSS...............shutdown > KARLSUSS2............. > KS BONDER............. > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT.................shutdown. vp vac sensor problem > SVGCOAT2............... > SVGDEV.................... > SVGDEV2.................. > ULTRATECH............ > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Tue Jan 7 08:32:51 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Tue, 07 Jan 2003 08:32:51 -0800 Subject: litho a.m. report 1/7/03 References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3E1B0133.25E86B72@snf.stanford.edu> > > > Litho Equipment Status Report > 1/7/03 > > AFM1....................... > AFM2....................... > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ > EV BONDER............. > LAUREL................... > HEADWAY2............. > KARLSUSS...............shutdown > KARLSUSS2............. > KS BONDER............. > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT................. > SVGCOAT2............... > SVGDEV....................problem. send indexer not sending > SVGDEV2.................. > ULTRATECH............ > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Wed Jan 8 08:56:13 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Wed, 08 Jan 2003 08:56:13 -0800 Subject: litho a.m. report 1/8/03 References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3E1C582D.5F03C5F0@snf.stanford.edu> > > > Litho Equipment Status Report > 1/8/03 > > AFM1....................... > AFM2....................... > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................new integrator lens installed. intensity > 15mw/cm2 uniformity .6% @ 365nm > EV BONDER............. > LAUREL................... > HEADWAY2............. > KARLSUSS...............shutdown > KARLSUSS2............. > KS BONDER............. > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT................. > SVGCOAT2............... > SVGDEV.................... > SVGDEV2.................. > ULTRATECH............ > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Thu Jan 9 08:35:33 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Thu, 09 Jan 2003 08:35:33 -0800 Subject: litho a. m. report 1/9/03 References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3E1DA4D5.42BC2BD2@snf.stanford.edu> > > > Litho Equipment Status Report > 1/9/03 > > AFM1....................... > AFM2....................... > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................intensity issues resolved. back to CI mode @ > 15mw/cm2 uniformity = .6% > EV BONDER............. > LAUREL................... > HEADWAY2............. > KARLSUSS...............shutdown > KARLSUSS2............. > KS BONDER............. > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT................. > SVGCOAT2............... > SVGDEV.................... > SVGDEV2.................. > ULTRATECH............ > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Fri Jan 10 08:51:24 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Fri, 10 Jan 2003 08:51:24 -0800 Subject: litho a.m. report 1/10/03 References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3E1EFA0C.2DCAE143@snf.stanford.edu> > > > Litho Equipment Status Report > 1/10/03 > > AFM1....................... > AFM2.......................problem. computer glitch during operation > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ > EV BONDER............. > LAUREL................... > HEADWAY2............. > KARLSUSS...............shutdown > KARLSUSS2............. > KS BONDER............. > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT................. > SVGCOAT2............... > SVGDEV.................... > SVGDEV2.................. > ULTRATECH............ > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Mon Jan 13 08:45:46 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Mon, 13 Jan 2003 08:45:46 -0800 Subject: litho a.m. report 1/13/03 References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3E22ED39.FB4FF2E6@snf.stanford.edu> > > > Litho Equipment Status Report > 1/13/03 > > AFM1....................... > AFM2.......................problem. computer locks up during operation > > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ > EV BONDER............. > LAUREL................... > HEADWAY2............. > KARLSUSS...............shutdown. > KARLSUSS2.............shutdown. z-motor failure > KS BONDER............. > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT................. > SVGCOAT2............... > SVGDEV.................... > SVGDEV2.................. > ULTRATECH............ > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Tue Jan 14 08:31:35 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Tue, 14 Jan 2003 08:31:35 -0800 Subject: litho a.m. report 1/14/03 References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3E243B67.8A3978BD@snf.stanford.edu> > > > Litho Equipment Status Report > 1/14/03 > > AFM1....................... > AFM2.......................problem. computer glitch > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ > EV BONDER............. > LAUREL................... > HEADWAY2............. > KARLSUSS...............shutdown > KARLSUSS2.............problem. tsa movement problem > KS BONDER............. > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT.................hot plate temp. VP 124C HP 90C > SVGCOAT2...............hot plate temp. VP 125C HP 91C > SVGDEV....................hot plate temp. HP 110C > SVGDEV2..................hot plate temp. HP 109C > ULTRATECH............ > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Wed Jan 15 08:34:25 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Wed, 15 Jan 2003 08:34:25 -0800 Subject: litho a.m. report 1/15/03 References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3E258D91.9FDC699@snf.stanford.edu> > > > Litho Equipment Status Report > 1/15/03 > > AFM1....................... > AFM2.......................problem. software glitch > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ > EV BONDER............. > LAUREL................... > HEADWAY2............. > KARLSUSS...............shutdown > KARLSUSS2............. > KS BONDER............. > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT................. > SVGCOAT2............... > SVGDEV.................... > SVGDEV2.................. > ULTRATECH............ > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Thu Jan 16 10:59:35 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Thu, 16 Jan 2003 10:59:35 -0800 Subject: PB oven temp Jan 16, 2003 Message-ID: <3E270117.39F718E3@snf.stanford.edu> Results for oven temp check: 90C pre bake = 89.8C degrees 110C post bake = 111.4C degrees Please see Mike if you have any questions. From vilanova at snf.stanford.edu Fri Jan 17 08:28:58 2003 From: vilanova at snf.stanford.edu (Mario Vilanova) Date: Fri, 17 Jan 2003 08:28:58 -0800 (PST) Subject: equip status (fwd) Message-ID: ---------- Forwarded message ---------- Date: Fri, 9 Aug 2002 08:27:32 -0700 (PDT) From: Eddy Vilanova To: litho at snf.stanford.edu, rcrane at snf.stanford.edu > > Litho Equipment Status Report > 01/17/03 > > AFM1....................... > AFM2....................... COmputer Problem > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ > EV BONDER............ > LAUREL................... > HEADWAY2............. > KARLSUSS............... SHUTDOWN > KARLSUSS2............. > KS BONDER............. > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT................. > SVGCOAT2............... > SVGDEV.................... > SVGDEV2.................. > ULTRATECH............ > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > ZYGO........................ > > __________________________________________________ Do You Yahoo!? HotJobs - Search Thousands of New Jobs http://www.hotjobs.com From martinez at snf.stanford.edu Tue Jan 21 08:40:26 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Tue, 21 Jan 2003 08:40:26 -0800 Subject: litho a.m. report 1/21/03 References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3E2D77FA.215F0AA0@snf.stanford.edu> > > > Litho Equipment Status Report > 1/21/03 > > AFM1....................... > AFM2.......................problem. computer glitch > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ > EV BONDER............. > LAUREL................... > HEADWAY2............. > KARLSUSS...............shutdown > KARLSUSS2............. > KS BONDER............. > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT................. > SVGCOAT2............... > SVGDEV.................... > SVGDEV2.................. > ULTRATECH............ > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Thu Jan 23 08:40:31 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Thu, 23 Jan 2003 08:40:31 -0800 Subject: litho a.m. report 1/23/03 References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3E301AFF.E68773EF@snf.stanford.edu> > > > Litho Equipment Status Report > 1/23/03 > > AFM1....................... > AFM2.......................problem. computer glitch > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ > EV BONDER............. > LAUREL................... > HEADWAY2............. > KARLSUSS...............shutdown > KARLSUSS2............. > KS BONDER............. > LITHOSOLV............. > MASKSCRUB........... > NANO1......................problem. computer glitch > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT................. > SVGCOAT2............... > SVGDEV.................... > SVGDEV2.................. > ULTRATECH............ > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Fri Jan 24 08:25:44 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Fri, 24 Jan 2003 08:25:44 -0800 Subject: litho a.m. report 1/24/03 References: <3D514009.D98B3289@snf.stanford.edu> Message-ID: <3E316908.194A3883@snf.stanford.edu> > > > Litho Equipment Status Report > 1/24/03 > > AFM1....................... > AFM2.......................problem. computer > BLUE M................... > DEKTAK CLEAN.... > DEKTAK Au............ > ELLIPSOMETER..... > ELP1......................... > ELP2......................... > EV ALIGN................ > EV BONDER............. > LAUREL................... > HEADWAY2............. > KARLSUSS...............shutdown > KARLSUSS2............. > KS BONDER............. > LITHOSOLV............. > MASKSCRUB........... > NANO1...................... > NANO2...................... > NIKON...................... > R2T2.......................... > SVGCOAT................. > SVGCOAT2............... > SVGDEV.................... > SVGDEV2.................. > ULTRATECH............ > ULTRATECH2.......... > UVCURE................... > WBMISCRES............ > YES OVEN................ > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Tue Jan 28 08:21:41 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Tue, 28 Jan 2003 08:21:41 -0800 Subject: litho a.m. report 1/28/03 References: <3E35A6EE.16DD0FA4@snf.stanford.edu> Message-ID: <3E36AE15.138DC474@snf.stanford.edu> > > > Photolithography Equipment Status Report > 1/28/03 > > AFM1............... > AFM2...............problem. computer glitching > BLUE M............. > DEKTAK CLEAN.... > DEKTAK Au......... > ELLIPSOMETER.... > ELP1................ > ELP2................ > EVALIGN........... > EVBONDER......... > LAUREL............. > HEADWAY2......... > KARLSUSS..........shutdown > KARLSUSS2......... > KSBONDER.......... > LITHOSOLV......... > MASKSCRUB......... > NANO1.............. > NANO2.............. > NIKON............... > NIKON2.............. > RT2................... > SVGCOAT............. > SVGCOAT2............ > SVGDEV............... > SVGDEV2.............. > ULTRATECH........... > ULTRATECH2.......... > UVCURE................ > WBMISCRES........... > YES OVEN.............. > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Wed Jan 29 08:30:59 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Wed, 29 Jan 2003 08:30:59 -0800 Subject: litho a.m. report 1/29/03 References: <3E35A6EE.16DD0FA4@snf.stanford.edu> Message-ID: <3E3801C2.1917BCFD@snf.stanford.edu> > > > Photolithography Equipment Status Report > 1/29/03 > > AFM1............... > AFM2...............problem. computer glitch during operation > BLUE M............. > DEKTAK CLEAN.... > DEKTAK Au......... > ELLIPSOMETER.... > ELP1................ > ELP2................ > EVALIGN........... > EVBONDER......... > LAUREL............. > HEADWAY2......... > KARLSUSS..........shutdown > KARLSUSS2......... > KSBONDER.......... > LITHOSOLV......... > MASKSCRUB......... > NANO1.............. > NANO2.............. > NIKON............... > NIKON2.............. > RT2................... > SVGCOAT............. > SVGCOAT2............ > SVGDEV............... > SVGDEV2.............. > ULTRATECH........... > ULTRATECH2.......... > UVCURE................ > WBMISCRES........... > YES OVEN.............. > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Thu Jan 30 08:40:21 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Thu, 30 Jan 2003 08:40:21 -0800 Subject: litho a.m. report 1/30/03 References: <3E35A6EE.16DD0FA4@snf.stanford.edu> Message-ID: <3E395575.A8A83F1D@snf.stanford.edu> An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Fri Jan 31 08:40:41 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Fri, 31 Jan 2003 08:40:41 -0800 Subject: litho a.m. report 1/31/03 References: <3E35A6EE.16DD0FA4@snf.stanford.edu> Message-ID: <3E3AA709.10283041@snf.stanford.edu> An HTML attachment was scrubbed... URL: