equip status (fwd)

Mario Vilanova vilanova at snf.stanford.edu
Fri Jan 17 08:28:58 PST 2003




---------- Forwarded message ----------
Date: Fri, 9 Aug 2002 08:27:32 -0700 (PDT)
From: Eddy Vilanova <eddy97 at yahoo.com>
To: litho at snf.stanford.edu, rcrane at snf.stanford.edu
> 
>                      Litho Equipment Status Report
>                                 01/17/03
> 
> AFM1.......................
> AFM2....................... COmputer Problem
> BLUE M...................
> DEKTAK CLEAN....
> DEKTAK Au............
> ELLIPSOMETER.....
> ELP1.........................
> ELP2.........................
> EV ALIGN................
> EV BONDER............
> LAUREL...................
> HEADWAY2.............
> KARLSUSS............... SHUTDOWN
> KARLSUSS2.............
> KS BONDER.............
> LITHOSOLV.............
> MASKSCRUB...........
> NANO1......................
> NANO2......................
> NIKON......................
> R2T2..........................
> SVGCOAT.................
> SVGCOAT2...............
> SVGDEV....................
> SVGDEV2..................
> ULTRATECH............
> ULTRATECH2..........
> UVCURE...................
> WBMISCRES............
> YES OVEN................
> ZYGO........................
> 
> 


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