litho a.m. report 1/28/03

Mike Martinez martinez at snf.stanford.edu
Tue Jan 28 08:21:41 PST 2003





>
>
>               Photolithography Equipment Status Report
>                                1/28/03
>
> AFM1...............
> AFM2...............problem. computer glitching
> BLUE M.............
> DEKTAK CLEAN....
> DEKTAK Au.........
> ELLIPSOMETER....
> ELP1................
> ELP2................
> EVALIGN...........
> EVBONDER.........
> LAUREL.............
> HEADWAY2.........
> KARLSUSS..........shutdown
> KARLSUSS2.........
> KSBONDER..........
> LITHOSOLV.........
> MASKSCRUB.........
> NANO1..............
> NANO2..............
> NIKON...............
> NIKON2..............
> RT2...................
> SVGCOAT.............
> SVGCOAT2............
> SVGDEV...............
> SVGDEV2..............
> ULTRATECH...........
> ULTRATECH2..........
> UVCURE................
> WBMISCRES...........
> YES OVEN..............
>
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