From martinez at snf.stanford.edu Mon Mar 3 08:27:32 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Mon, 03 Mar 2003 08:27:32 -0800 Subject: litho a.m. report 3/3/03 References: <3E35A6EE.16DD0FA4@snf.stanford.edu> Message-ID: <3E638274.FCD67F7C@snf.stanford.edu> An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Tue Mar 4 08:10:15 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Tue, 04 Mar 2003 08:10:15 -0800 Subject: litho a.m. report 3/4/03 References: <3E35A6EE.16DD0FA4@snf.stanford.edu> Message-ID: <3E64CFE7.D4C70EF3@snf.stanford.edu> An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Wed Mar 5 08:08:30 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Wed, 05 Mar 2003 08:08:30 -0800 Subject: litho a.m. report 3/5/03 References: <3E35A6EE.16DD0FA4@snf.stanford.edu> Message-ID: <3E6620FE.A75AEEB9@snf.stanford.edu> An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Thu Mar 6 08:06:05 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Thu, 06 Mar 2003 08:06:05 -0800 Subject: litho a.m. report 3/6/03 References: <3E35A6EE.16DD0FA4@snf.stanford.edu> Message-ID: <3E6771ED.CA9FAFE2@snf.stanford.edu> An HTML attachment was scrubbed... URL: From vilanova at snf.stanford.edu Fri Mar 7 08:37:21 2003 From: vilanova at snf.stanford.edu (eddy) Date: Fri, 07 Mar 2003 08:37:21 -0800 Subject: Litho Am Status Report References: <20020809152732.24915.qmail@web40304.mail.yahoo.com> Message-ID: <3E68CAC1.2B18990C@snf.stanford.edu> > > > > > Litho Equipment Status Report > > 03/07/03 > > > > AFM1....................... > > AFM2....................... > > BLUE M................... > > DEKTAK CLEAN.... > > DEKTAK Au............ > > ELLIPSOMETER..... > > ELP1......................... > > ELP2......................... > > EV ALIGN................ > > EV BONDER........... Shutdown. Bond Glass & pressure Plate on order > . > > LAUREL................... > > HEADWAY2............. > > KARLSUSS............... > > KARLSUSS2.............Problem. BSA Motor on Order . No ETA > > KS BONDER............. > > LITHOSOLV............. > > MASKSCRUB........... > > NANO1...................... > > NANO2...................... > > NIKON...................... > > R2T2..........................Shutdown. Won't Measure. > > SVGCOAT................. > > SVGCOAT2............... > > SVGDEV.................... > > SVGDEV2.................. > > ULTRATECH............ > > ULTRATECH2.......... > > UVCURE................... > > WBMISCRES............ > > YES OVEN................ > > ZYGO........................ > > __________________________________________________ -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Mon Mar 10 08:31:06 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Mon, 10 Mar 2003 08:31:06 -0800 Subject: litho a.m. report 3/10/03 References: <3E35A6EE.16DD0FA4@snf.stanford.edu> Message-ID: <3E6CBDCA.C48ABCED@snf.stanford.edu> An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Tue Mar 11 08:21:11 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Tue, 11 Mar 2003 08:21:11 -0800 Subject: litho a.m. report 3/11/03 References: <3E35A6EE.16DD0FA4@snf.stanford.edu> Message-ID: <3E6E0CF7.9D3471C7@snf.stanford.edu> An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Tue Mar 11 16:22:10 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Tue, 11 Mar 2003 16:22:10 -0800 Subject: litho hotplates & ovens temp check Message-ID: <3E6E7DB2.6EBF6579@snf.stanford.edu> An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Thu Mar 13 08:22:15 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Thu, 13 Mar 2003 08:22:15 -0800 Subject: litho a.m. report 3/13/03 References: <3E35A6EE.16DD0FA4@snf.stanford.edu> Message-ID: <3E70B037.D2A72A52@snf.stanford.edu> An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Fri Mar 14 08:01:30 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Fri, 14 Mar 2003 08:01:30 -0800 Subject: litho a.m. report 3/14/03 References: <3E35A6EE.16DD0FA4@snf.stanford.edu> Message-ID: <3E71FCDA.6214522E@snf.stanford.edu> An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Mon Mar 17 08:09:05 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Mon, 17 Mar 2003 08:09:05 -0800 Subject: litho a.m. report 3/17/03 References: <3E35A6EE.16DD0FA4@snf.stanford.edu> Message-ID: <3E75F320.A4B5A73C@snf.stanford.edu> An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Tue Mar 18 08:02:11 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Tue, 18 Mar 2003 08:02:11 -0800 Subject: litho a.m. report 3/18/03 References: <3E35A6EE.16DD0FA4@snf.stanford.edu> Message-ID: <3E774303.7205A8D@snf.stanford.edu> An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Wed Mar 19 07:58:47 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Wed, 19 Mar 2003 07:58:47 -0800 Subject: litho a.m. report 3/19/03 References: <3E35A6EE.16DD0FA4@snf.stanford.edu> Message-ID: <3E7893B7.107E81B9@snf.stanford.edu> An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Thu Mar 20 08:22:00 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Thu, 20 Mar 2003 08:22:00 -0800 Subject: litho a.m. report 3/20/03 References: <3E35A6EE.16DD0FA4@snf.stanford.edu> Message-ID: <3E79EAA8.8AE6D162@snf.stanford.edu> An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Fri Mar 21 08:01:35 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Fri, 21 Mar 2003 08:01:35 -0800 Subject: litho a.m. report 3/21/03 References: <3E35A6EE.16DD0FA4@snf.stanford.edu> Message-ID: <3E7B375F.98929CEA@snf.stanford.edu> An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Mon Mar 24 08:10:43 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Mon, 24 Mar 2003 08:10:43 -0800 Subject: litho a.m. report 3/24/03 References: <3E35A6EE.16DD0FA4@snf.stanford.edu> Message-ID: <3E7F2E03.9CF9019A@snf.stanford.edu> An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Tue Mar 25 08:06:42 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Tue, 25 Mar 2003 08:06:42 -0800 Subject: litho a.m. report 3/25/03 References: <3E35A6EE.16DD0FA4@snf.stanford.edu> Message-ID: <3E807E91.F5FA0169@snf.stanford.edu> An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Wed Mar 26 08:02:37 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Wed, 26 Mar 2003 08:02:37 -0800 Subject: litho a.m. report 3/26/03 References: <3E35A6EE.16DD0FA4@snf.stanford.edu> Message-ID: <3E81CF1D.68D21FB4@snf.stanford.edu> An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Thu Mar 27 08:02:24 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Thu, 27 Mar 2003 08:02:24 -0800 Subject: litho a.m. report 3/27/03 References: <3E35A6EE.16DD0FA4@snf.stanford.edu> Message-ID: <3E832090.207B0DD@snf.stanford.edu> An HTML attachment was scrubbed... URL: From vilanova at snf.stanford.edu Thu Mar 27 10:22:43 2003 From: vilanova at snf.stanford.edu (Mario Vilanova) Date: Thu, 27 Mar 2003 10:22:43 -0800 (PST) Subject: hotplate calibration Message-ID: HOTPLATE CALIBRATION FOR THE WEEK OF 3/27/03 POST EXPOSE HOTPLATE 115oC = 113.7 Co COATER TRACK I ( POST BAKE ) 90oC = 88.4Co COATER TRACK II 90oC = 92Co DEVELOPER TRACK I 110oC = 112oC DEVELOPER TRACK II 110oC = 108oC From vilanova at snf.stanford.edu Fri Mar 28 08:53:15 2003 From: vilanova at snf.stanford.edu (eddy) Date: Fri, 28 Mar 2003 08:53:15 -0800 Subject: Am equip status Report 3/28/03 References: <20020809152732.24915.qmail@web40304.mail.yahoo.com> Message-ID: <3E847DFB.32A0FCE0@snf.stanford.edu> > > > > > Litho Equipment Status Report > > 03/28/03 > > > > AFM1....................... > > AFM2....................... > > BLUE M................... > > DEKTAK CLEAN.... > > DEKTAK Au............ > > ELLIPSOMETER..... > > ELP1......................... > > ELP2......................... > > EV ALIGN................ > > EV BONDER............. > > LAUREL................... > > HEADWAY2............. > > KARLSUSS...............Shutdown . Conversion to DUV Continues today > > KARLSUSS2.............Problem . BSA Motor Sent out for Repair. > > KS BONDER............. > > LITHOSOLV............. > > MASKSCRUB........... > > NANO1...................... > > NANO2...................... > > NIKON...................... > > R2T2.......................... shutdown. won't measure > > SVGCOAT................. > > SVGCOAT2............... > > SVGDEV.................... > > SVGDEV2.................. > > ULTRATECH............ > > ULTRATECH2.......... > > UVCURE................... > > WBMISCRES............ > > YES OVEN................ > > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From vilanova at snf.stanford.edu Mon Mar 31 08:32:33 2003 From: vilanova at snf.stanford.edu (eddy) Date: Mon, 31 Mar 2003 08:32:33 -0800 Subject: 3/31/03 AM REPORT References: <20020809152732.24915.qmail@web40304.mail.yahoo.com> Message-ID: <3E886DA0.3105A816@snf.stanford.edu> > > > > > Litho Equipment Status Report > > 03/31/03 > > > > AFM1....................... > > AFM2....................... > > BLUE M................... > > DEKTAK CLEAN.... > > DEKTAK Au............ > > ELLIPSOMETER..... > > ELP1......................... > > ELP2......................... > > EV ALIGN................ > > EV BONDER.............. > > LAUREL................... > > HEADWAY2............. > > KARLSUSS...............Shutdown - Conversion To DUV continues. > > KARLSUSS2.............Problem - BSA Motor sent out for repair. > > KS BONDER............. > > LITHOSOLV............. > > MASKSCRUB........... > > NANO1...................... > > NANO2...................... > > NIKON...................... > > R2T2..........................Shutdown - Won't Measure. > > SVGCOAT................. > > SVGCOAT2............... > > SVGDEV.................... > > SVGDEV2.................. > > ULTRATECH............ > > ULTRATECH2.......... > > UVCURE................... > > WBMISCRES............ > > YES OVEN................ > > ZYGO........................ > -------------- next part -------------- An HTML attachment was scrubbed... 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