hotplate calibration

Mario Vilanova vilanova at snf.stanford.edu
Thu Mar 27 10:22:43 PST 2003


HOTPLATE CALIBRATION FOR THE WEEK OF 3/27/03

POST EXPOSE HOTPLATE
115oC = 113.7 Co
COATER TRACK I ( POST BAKE )
90oC =  88.4Co
COATER TRACK II
90oC =  92Co
DEVELOPER TRACK I 
110oC = 112oC
DEVELOPER TRACK II
110oC = 108oC




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