3/31/03 AM REPORT

eddy vilanova at snf.stanford.edu
Mon Mar 31 08:32:33 PST 2003




>
> >
> >                      Litho Equipment Status Report
> >                                 03/31/03
> >
> > AFM1.......................
> > AFM2.......................
> > BLUE M...................
> > DEKTAK CLEAN....
> > DEKTAK Au............
> > ELLIPSOMETER.....
> > ELP1.........................
> > ELP2.........................
> > EV ALIGN................
> > EV BONDER..............
> > LAUREL...................
> > HEADWAY2.............
> > KARLSUSS...............Shutdown - Conversion To DUV continues.
> > KARLSUSS2.............Problem -   BSA Motor sent out for repair.
> > KS BONDER.............
> > LITHOSOLV.............
> > MASKSCRUB...........
> > NANO1......................
> > NANO2......................
> > NIKON......................
> > R2T2..........................Shutdown - Won't Measure.
> > SVGCOAT.................
> > SVGCOAT2...............
> > SVGDEV....................
> > SVGDEV2..................
> > ULTRATECH............
> > ULTRATECH2..........
> > UVCURE...................
> > WBMISCRES............
> > YES OVEN................
> > ZYGO........................
>
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/litho/attachments/20030331/771ab6ba/attachment.html>


More information about the litho mailing list