From martinez at snf.stanford.edu Thu May 1 08:35:46 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Thu, 01 May 2003 08:35:46 -0700 Subject: litho a.m. report 5/1/03 References: <3E35A6EE.16DD0FA4@snf.stanford.edu> Message-ID: <3EB13ED2.CD8EC50C@snf.stanford.edu> An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Fri May 2 08:01:54 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Fri, 02 May 2003 08:01:54 -0700 Subject: litho a.m. report 5/2/03 References: <3E35A6EE.16DD0FA4@snf.stanford.edu> Message-ID: <3EB28862.CCC8E563@snf.stanford.edu> An HTML attachment was scrubbed... URL: From vilanova at snf.stanford.edu Mon May 5 09:49:36 2003 From: vilanova at snf.stanford.edu (eddy) Date: Mon, 05 May 2003 09:49:36 -0700 Subject: AM REPORT 5/05/03 References: <20020809152732.24915.qmail@web40304.mail.yahoo.com> Message-ID: <3EB69620.B13B6BED@snf.stanford.edu> > > > > > Litho Equipment Status Report > > 05/05/03 > > > > AFM1....................... > > AFM2....................... > > BLUE M................... > > DEKTAK CLEAN.... > > DEKTAK Au............ > > ELLIPSOMETER..... > > ELP1......................... > > ELP2......................... > > EV ALIGN................ > > EV BONDER.............. > > LAUREL................... > > HEADWAY2............. > > KARLSUSS............... > > KARLSUSS2............. Problem - Bsa Motor arriving 8/01/03 > > KS BONDER............. > > LITHOSOLV............. > > MASKSCRUB........... > > NANO1...................... > > NANO2...................... > > NIKON...................... > > R2T2.......................... Shutdown - In Qual > > SVGCOAT................. > > SVGCOAT2............... > > SVGDEV.................... > > SVGDEV2.................. > > ULTRATECH............ > > ULTRATECH2.......... > > UVCURE................... > > WBMISCRES............ > > YES OVEN................ From vilanova at snf.stanford.edu Tue May 6 08:10:18 2003 From: vilanova at snf.stanford.edu (eddy) Date: Tue, 06 May 2003 08:10:18 -0700 Subject: AM REPORT 5/06/03 References: <20020809152732.24915.qmail@web40304.mail.yahoo.com> Message-ID: <3EB7D05A.B5AA8FA0@snf.stanford.edu> > > > > > Litho Equipment Status Report > > 05/06/03 > > > > AFM1....................... > > AFM2....................... > > BLUE M................... > > DEKTAK CLEAN.... > > DEKTAK Au............ > > ELLIPSOMETER..... > > ELP1......................... > > ELP2......................... > > EV ALIGN................ > > EV BONDER.............. > > LAUREL................... > > HEADWAY2............. > > KARLSUSS............... > > KARLSUSS2............. Problem - BSA Motor Expected to arrive 8/1/03 > > > KS BONDER............. > > LITHOSOLV............. > > MASKSCRUB........... > > NANO1...................... > > NANO2...................... > > NIKON......................Problem - Stage Driver and camera > failure. > > R2T2..........................SHutdown - in Qual . > > SVGCOAT................. > > SVGCOAT2............... > > SVGDEV.................... > > SVGDEV2.................. > > ULTRATECH............ > > ULTRATECH2.......... > > UVCURE................... > > WBMISCRES............ > > YES OVEN................ -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Wed May 7 08:08:27 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Wed, 07 May 2003 08:08:27 -0700 Subject: litho a.m. report 5/7/03 References: <3E35A6EE.16DD0FA4@snf.stanford.edu> Message-ID: <3EB9216B.5C8AE2D6@snf.stanford.edu> An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Thu May 8 08:15:59 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Thu, 08 May 2003 08:15:59 -0700 Subject: litho a.m. report 5/8/03 References: <3E35A6EE.16DD0FA4@snf.stanford.edu> Message-ID: <3EBA74AF.3E65C477@snf.stanford.edu> An HTML attachment was scrubbed... URL: From vilanova at snf.stanford.edu Fri May 9 09:15:50 2003 From: vilanova at snf.stanford.edu (eddy) Date: Fri, 09 May 2003 09:15:50 -0700 Subject: AM REPORT 5/09/03 References: <20020809152732.24915.qmail@web40304.mail.yahoo.com> Message-ID: <3EBBD436.8F5ACB6@snf.stanford.edu> > > > > > Litho Equipment Status Report > > 05/09/03 > > > > AFM1....................... > > AFM2....................... > > BLUE M................... > > DEKTAK CLEAN.... > > DEKTAK Au............ > > ELLIPSOMETER..... > > ELP1......................... > > ELP2......................... > > EV ALIGN................ > > EV BONDER............. > > LAUREL................... > > HEADWAY2............. > > KARLSUSS............... > > KARLSUSS2............. Shutdown - Broken Microscope latch, BSA MOtor > ETA 8/01/03 > KS BONDER............. > > LITHOSOLV............. > > MASKSCRUB........... > > NANO1...................... > > NANO2...................... > > NIKON...................... > > R2T2..........................Shutdown - In Qual. > > SVGCOAT................. > > SVGCOAT2............... > > SVGDEV.................... > > SVGDEV2.................. > > ULTRATECH............ > > ULTRATECH2.......... > > UVCURE................... > > WBMISCRES............ > > YES OVEN................ > From martinez at snf.stanford.edu Mon May 12 08:11:41 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Mon, 12 May 2003 08:11:41 -0700 Subject: litho a.m. report 5/12/03 References: <3E35A6EE.16DD0FA4@snf.stanford.edu> Message-ID: <3EBFB9AD.E514BF15@snf.stanford.edu> An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Tue May 13 08:08:44 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Tue, 13 May 2003 08:08:44 -0700 Subject: litho a.m. report 5/13/03 References: <3E35A6EE.16DD0FA4@snf.stanford.edu> Message-ID: <3EC10A7C.630F1077@snf.stanford.edu> An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Wed May 14 08:00:44 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Wed, 14 May 2003 08:00:44 -0700 Subject: litho a.m. report 5/14/03 References: <3E35A6EE.16DD0FA4@snf.stanford.edu> Message-ID: <3EC25A1C.7F3C151F@snf.stanford.edu> An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Thu May 15 08:31:18 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Thu, 15 May 2003 08:31:18 -0700 Subject: litho a.m. report 5/15/03 References: <3E35A6EE.16DD0FA4@snf.stanford.edu> Message-ID: <3EC3B2C6.53FD8D8D@snf.stanford.edu> An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Fri May 16 07:59:24 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Fri, 16 May 2003 07:59:24 -0700 Subject: litho a.m. report 5/16/03 References: <3E35A6EE.16DD0FA4@snf.stanford.edu> Message-ID: <3EC4FCCC.283DBFAD@snf.stanford.edu> An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Mon May 19 07:58:01 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Mon, 19 May 2003 07:58:01 -0700 Subject: litho a.m. report 5/19/03 References: <3E35A6EE.16DD0FA4@snf.stanford.edu> Message-ID: <3EC8F0F9.5A4A3B4B@snf.stanford.edu> An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Tue May 20 08:04:14 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Tue, 20 May 2003 08:04:14 -0700 Subject: litho a.m. report 5/20/03 References: <3E35A6EE.16DD0FA4@snf.stanford.edu> Message-ID: <3ECA43EE.E2119B3E@snf.stanford.edu> An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Wed May 21 08:08:12 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Wed, 21 May 2003 08:08:12 -0700 Subject: litho a.m. report 5/21/03 References: <3E35A6EE.16DD0FA4@snf.stanford.edu> Message-ID: <3ECB965C.112BB671@snf.stanford.edu> An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Thu May 22 08:02:52 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Thu, 22 May 2003 08:02:52 -0700 Subject: litho a.m. report 5/22/03 References: <3E35A6EE.16DD0FA4@snf.stanford.edu> Message-ID: <3ECCE69C.500F8D50@snf.stanford.edu> An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Tue May 27 08:04:10 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Tue, 27 May 2003 08:04:10 -0700 Subject: litho a.m. report References: <3E35A6EE.16DD0FA4@snf.stanford.edu> Message-ID: <3ED37E6A.BA95FDB3@snf.stanford.edu> An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Wed May 28 08:06:06 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Wed, 28 May 2003 08:06:06 -0700 Subject: litho a.m. report 5/28/03 References: <3E35A6EE.16DD0FA4@snf.stanford.edu> Message-ID: <3ED4D05D.9210C9DD@snf.stanford.edu> An HTML attachment was scrubbed... URL: From vilanova at snf.stanford.edu Thu May 29 08:43:11 2003 From: vilanova at snf.stanford.edu (eddy) Date: Thu, 29 May 2003 08:43:11 -0700 Subject: AM report 5/29/03 References: <20020809152732.24915.qmail@web40304.mail.yahoo.com> Message-ID: <3ED62A8E.DD00A659@snf.stanford.edu> > > > > > > > > Litho Equipment Status Report > > 05/29/03 > > > > AFM1....................... > > AFM2....................... > > BLUE M................... > > DEKTAK CLEAN.... > > DEKTAK Au............ > > ELLIPSOMETER..... > > ELP1......................... > > ELP2......................... > > EV ALIGN................ > > EV BONDER............. > > LAUREL................... > > HEADWAY2............. > > KARLSUSS...............shutdown. dead lamp power supply > > KARLSUSS2.............problem. bsa repair eta 8/1/03 > > KS BONDER............. > > LITHOSOLV............. > > MASKSCRUB........... > > NANO1...................... > > NANO2...................... > > NIKON...................... > > R2T2.......................... > > SVGCOAT................. > > SVGCOAT2............... > > SVGDEV.................... > > SVGDEV2.................. > > ULTRATECH............ > > ULTRATECH2.......... > > UVCURE................... > > WBMISCRES............ > > YES OVEN................ > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Fri May 30 08:03:33 2003 From: martinez at snf.stanford.edu (Mike Martinez) Date: Fri, 30 May 2003 08:03:33 -0700 Subject: litho a.m. report 5/30/03 References: <3E35A6EE.16DD0FA4@snf.stanford.edu> Message-ID: <3ED772C5.4269EF1D@snf.stanford.edu> An HTML attachment was scrubbed... URL: