Equipment Status 4/23/04

Mario Vilanova vilanova at snf.stanford.edu
Fri Apr 23 10:44:19 PDT 2004



> 
> 
>                      Litho Equipment Status Report
>                                 04/23/04
> 
> AFM1.......................
> AFM2.......................
> BLUE M...................
> DEKTAK CLEAN....
> DEKTAK Au............
> ELLIPSOMETER.....
> ELP1.........................
> ELP2.........................
> EV ALIGN..............
> EV BONDER.............
> LAUREL...................
> HEADWAY2.............
> KARLSUSS...............
> KARLSUSS2.............
> KS BONDER.............
> LITHOSOLV.............
> MASKSCRUB...........
> NANO1......................
> NANO2...................... Problem - FOCUS 
> NIKON......................
> R2T2..........................
> SVGCOAT.................
> SVGCOAT2...............
> SVGDEV....................
> SVGDEV2..................
> ULTRATECH............
> ULTRATECH2..........
> UVCURE...................
> WBMISCRES............
> YES OVEN................
> ZYGO........................
> 
> 


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