Litho AM Report 8/13/04

Eddy Mario Vilanova vilanova at snf.stanford.edu
Fri Aug 13 10:47:01 PDT 2004




>
>
>                        PHOTO EQUIPMENT STATUS
>                                8/13/04
>
> AFM2.....................
> BLUE M.................
> DEKTAK CLEAN...
> DEKTAK AU..........
> DNSCOAT..............
> DSNDEV.................
> ELLIPSOMETER.....
> ELP1........................
> ELP2........................
> EVALIGN.................problem. z motor initialization problem
> EVBOND..................
> LAURELL................
> HEADWAY2.............
> KARLSUSS...............
> KARLSUSS2.............problem. damaged wec unit.
> KSBONDER..............
> LITHOSOLV.............
> MASKSCRUB...........
> NANO1.....................
> NANO2.....................
> NIKON......................
> NIKON2.....................
> SVGCOAT.................
> SVGCOAT2................
> SVGDEV....................
> SVGDEV2...................
> ULTRATECH.............
> ULTRATECH2............
> UVCURE.....................
> WBMISCRES...............
> YES OVEN...................
>
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