Hotplates and Ovens Temperatures ( August 13.04)

Eddy Mario Vilanova vilanova at snf.stanford.edu
Fri Aug 13 11:12:50 PDT 2004


Hotplates and Ovens Temperatures
                   August ,13 04

Svg Coater  I  HMDS Set point 125c            Actual 124c
Svg Coater II HMDS Set Point 125c            Actual 124.6c


Svg COater I Post Bake Set point 90c           Actual 89.0
Svg COater II Post Bake Set Point 90c         Actual 91.2

Developer track I Set Point 110c                   Actual 111.3
Developer Track II Set POint 110c                Actual 108.0


90c   Hotplate  ----->     Actual 92.4
115c Hotplate ------>     Actual 115.4


Data  Hotplates
#1 Set Point 180c         Actual 181.7c
#2 Set Point 200c         Actual 200.4c
#3 Set Point 200c         Actual 202.5c
#4 Set Point 200c         Actual 202.0c

      *****Ovens*****
90c Pre bake -----         Actual 89.0
110c POst Bake -----     Actual 110
150c Singe  -----------     Actual 151.7
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