From martinez at snf.stanford.edu Thu Jul 1 08:10:15 2004 From: martinez at snf.stanford.edu (Mike Martinez) Date: Thu, 01 Jul 2004 08:10:15 -0700 Subject: litho 7/1/04 References: <40C4DAF9.97E83240@snf.stanford.edu> Message-ID: <40E42957.8E83DF1B@snf.stanford.edu> An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Fri Jul 2 08:10:48 2004 From: martinez at snf.stanford.edu (Mike Martinez) Date: Fri, 02 Jul 2004 08:10:48 -0700 Subject: litho 7/2/04 References: <40C4DAF9.97E83240@snf.stanford.edu> Message-ID: <40E57AF8.AD4C8FE3@snf.stanford.edu> An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Tue Jul 6 08:10:33 2004 From: martinez at snf.stanford.edu (Mike Martinez) Date: Tue, 06 Jul 2004 08:10:33 -0700 Subject: litho 7/6/04 References: <40C4DAF9.97E83240@snf.stanford.edu> Message-ID: <40EAC0E9.2243EC25@snf.stanford.edu> An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Wed Jul 7 08:12:29 2004 From: martinez at snf.stanford.edu (Mike Martinez) Date: Wed, 07 Jul 2004 08:12:29 -0700 Subject: litho 7/7/04 References: <40C4DAF9.97E83240@snf.stanford.edu> Message-ID: <40EC12DD.75FB3AB9@snf.stanford.edu> An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Thu Jul 8 08:04:36 2004 From: martinez at snf.stanford.edu (Mike Martinez) Date: Thu, 08 Jul 2004 08:04:36 -0700 Subject: litho 7/8/04 References: <40C4DAF9.97E83240@snf.stanford.edu> Message-ID: <40ED6284.8B47BD87@snf.stanford.edu> An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Thu Jul 8 15:07:36 2004 From: martinez at snf.stanford.edu (Mike Martinez) Date: Thu, 08 Jul 2004 15:07:36 -0700 Subject: photoresist thickness results Message-ID: <40EDC5A8.71CB03C0@snf.stanford.edu> svgcoat 3612-1.0um 3612-1.6um SPR220-7um SPR220-10um 10283 16880 71595 11.10um 10142 16802 71385 11.40um 10276 16867 71582 11.19um 10259 16862 71562 11.42um 10259 16893 71676 11.42um svgcoat2 3612-1.0um 3612-1.6um SPR220-3um 9871 16599 29806 9991 16665 29667 9861 16624 30183 9837 16597 29926 9890 16617 29771 From martinez at snf.stanford.edu Fri Jul 9 08:25:18 2004 From: martinez at snf.stanford.edu (Mike Martinez) Date: Fri, 09 Jul 2004 08:25:18 -0700 Subject: litho 7/9/04 References: <40C4DAF9.97E83240@snf.stanford.edu> Message-ID: <40EEB8DE.1A0732D4@snf.stanford.edu> An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Tue Jul 13 08:21:50 2004 From: martinez at snf.stanford.edu (Mike Martinez) Date: Tue, 13 Jul 2004 08:21:50 -0700 Subject: litho 7/13/04 References: <40C4DAF9.97E83240@snf.stanford.edu> Message-ID: <40F3FE0E.6E15E820@snf.stanford.edu> An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Wed Jul 14 08:25:24 2004 From: martinez at snf.stanford.edu (Mike Martinez) Date: Wed, 14 Jul 2004 08:25:24 -0700 Subject: litho 7/14/04 References: <40C4DAF9.97E83240@snf.stanford.edu> Message-ID: <40F55064.7B9D893F@snf.stanford.edu> An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Thu Jul 15 08:07:40 2004 From: martinez at snf.stanford.edu (Mike Martinez) Date: Thu, 15 Jul 2004 08:07:40 -0700 Subject: litho 7/15/04 References: <40C4DAF9.97E83240@snf.stanford.edu> Message-ID: <40F69DBC.1E0D57F4@snf.stanford.edu> An HTML attachment was scrubbed... URL: From vilanova at snf.stanford.edu Fri Jul 16 08:57:42 2004 From: vilanova at snf.stanford.edu (Eddy Mario Vilanova) Date: Fri, 16 Jul 2004 08:57:42 -0700 Subject: AM REPORT 7/16/04 References: <40E034AA.1280390A@snf.stanford.edu> Message-ID: <40F7FAF5.E2DC3B38@snf.stanford.edu> Mike Martinez wrote: > ---------------------------------------------------------------- > > Subject: TOOLS > Date: Mon, 07 Jun 2004 14:15:37 -0700 > From: Mike Martinez > To: martinez at snf.stanford.edu > > PHOTO EQUIPMENT STATUS > 7/16/04 > > AFM2..................... > BLUE M................. > DEKTAK CLEAN... > DEKTAK AU.......... > DNSCOAT.............. > DSNDEV................. > ELLIPSOMETER..... > ELP1........................ > ELP2........................ > EVALIGN................. > EVBOND..............problem. slow chuck vac on megasonic cleaner > LAURELL................ > HEADWAY2............. > KARLSUSS............... > KARLSUSS2............. > KSBONDER..............moved to a new location > LITHOSOLV............. > MASKSCRUB........... > NANO1..................... > NANO2..................... > NIKON...................... > NIKON2..................... > SVGCOAT................. > SVGCOAT2................ > SVGDEV.................... > SVGDEV2................... > ULTRATECH............. > ULTRATECH2............ > UVCURE..................... > WBMISCRES............... > YES OVEN................... > -------------- next part -------------- An HTML attachment was scrubbed... URL: From vilanova at snf.stanford.edu Mon Jul 19 08:07:23 2004 From: vilanova at snf.stanford.edu (Eddy Mario Vilanova) Date: Mon, 19 Jul 2004 08:07:23 -0700 Subject: AM REPORT 6/19/04 References: <40E034AA.1280390A@snf.stanford.edu> Message-ID: <40FBE3AB.DC92F8DA@snf.stanford.edu> > ---------------------------------------------------------------- > > Subject: TOOLS > Date: Mon, 07 Jun 2004 14:15:37 -0700 > From: Mike Martinez > To: martinez at snf.stanford.edu > > PHOTO EQUIPMENT STATUS > 6/19/04 > > AFM2..................... > BLUE M................. > DEKTAK CLEAN... > DEKTAK AU.......... > DNSCOAT.............. > DSNDEV................. > ELLIPSOMETER..... > ELP1........................ > ELP2........................ > EVALIGN................. > EVBOND.........Problem Cracked Glass Plate , Megasonic Vacuum Problem. > LAURELL HEADWAY2............. > KARLSUSS............... > KARLSUSS2............. > KSBONDER............. moved to a new location > LITHOSOLV............. > MASKSCRUB........... > NANO1..................... > NANO2..................... > NIKON...................... > NIKON2..................... > SVGCOAT................. > SVGCOAT2................ > SVGDEV.................... > SVGDEV2................... > ULTRATECH............. > ULTRATECH2............ > UVCURE..................... > WBMISCRES............... > YES OVEN................... > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Tue Jul 20 08:12:29 2004 From: martinez at snf.stanford.edu (Mike Martinez) Date: Tue, 20 Jul 2004 08:12:29 -0700 Subject: litho 7/20/04 References: <40C4DAF9.97E83240@snf.stanford.edu> Message-ID: <40FD365D.2A01435B@snf.stanford.edu> An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Wed Jul 21 08:18:48 2004 From: martinez at snf.stanford.edu (Mike Martinez) Date: Wed, 21 Jul 2004 08:18:48 -0700 Subject: litho 7/21/04 References: <40C4DAF9.97E83240@snf.stanford.edu> Message-ID: <40FE8958.C1B78346@snf.stanford.edu> An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Wed Jul 21 16:18:21 2004 From: martinez at snf.stanford.edu (Mike Martinez) Date: Wed, 21 Jul 2004 16:18:21 -0700 Subject: hot plates & ovens temp check Message-ID: <40FEF9BC.4AC6D3C9@snf.stanford.edu> svgcoat vp hp set point 125C actual 123.8C post bake set point 90C actual 89.1C svgcoat2 vp hp set point 125C actual 124.0C post bake set point 90C actual 91.3C svgdev hp set point 110C actual 110.1C svgdev2 hp set point 110C actual 108.7C 90C hot plate actual 91.1C 115C hot plate actual 115.4C 90C pre bake oven actual 89.6C 110C post bake oven actual 110.7C 150C singe oven actual 155C data plates #1 set 180C actual 177C #2 set 180C actual 180.3C #3 set 150C actual 151.8C #4 set 160C actual 162.7C From martinez at snf.stanford.edu Thu Jul 22 08:18:24 2004 From: martinez at snf.stanford.edu (Mike Martinez) Date: Thu, 22 Jul 2004 08:18:24 -0700 Subject: litho 7/23/04 References: <40C4DAF9.97E83240@snf.stanford.edu> Message-ID: <40FFDAC0.A40CD786@snf.stanford.edu> An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Fri Jul 23 08:18:32 2004 From: martinez at snf.stanford.edu (Mike Martinez) Date: Fri, 23 Jul 2004 08:18:32 -0700 Subject: litho 7/23/04 References: <40C4DAF9.97E83240@snf.stanford.edu> Message-ID: <41012C48.F4D9DFEA@snf.stanford.edu> An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Mon Jul 26 08:12:50 2004 From: martinez at snf.stanford.edu (Mike Martinez) Date: Mon, 26 Jul 2004 08:12:50 -0700 Subject: litho 7/26/04 References: <40C4DAF9.97E83240@snf.stanford.edu> Message-ID: <41051F72.AFF50EC6@snf.stanford.edu> An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Tue Jul 27 08:04:36 2004 From: martinez at snf.stanford.edu (Mike Martinez) Date: Tue, 27 Jul 2004 08:04:36 -0700 Subject: litho 7/27/04 References: <40C4DAF9.97E83240@snf.stanford.edu> Message-ID: <41066F04.C53FF36F@snf.stanford.edu> An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Wed Jul 28 08:10:00 2004 From: martinez at snf.stanford.edu (Mike Martinez) Date: Wed, 28 Jul 2004 08:10:00 -0700 Subject: litho 7/28/04 References: <40C4DAF9.97E83240@snf.stanford.edu> Message-ID: <4107C1C8.19AA77EE@snf.stanford.edu> An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Thu Jul 29 08:16:06 2004 From: martinez at snf.stanford.edu (Mike Martinez) Date: Thu, 29 Jul 2004 08:16:06 -0700 Subject: litho 7/29/04 References: <40C4DAF9.97E83240@snf.stanford.edu> Message-ID: <410914B6.A3F9723B@snf.stanford.edu> An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Fri Jul 30 08:08:57 2004 From: martinez at snf.stanford.edu (Mike Martinez) Date: Fri, 30 Jul 2004 08:08:57 -0700 Subject: litho 7/30/04 References: <40C4DAF9.97E83240@snf.stanford.edu> Message-ID: <410A6489.D61700DA@snf.stanford.edu> An HTML attachment was scrubbed... URL: