photoresist thickness results

Mike Martinez martinez at snf.stanford.edu
Thu Jul 8 15:07:36 PDT 2004


svgcoat
3612-1.0um     3612-1.6um     SPR220-7um     SPR220-10um
10283                16880            71595                11.10um
10142                16802            71385                11.40um
10276                16867            71582                11.19um
10259                16862            71562                11.42um
10259                16893            71676                11.42um

svgcoat2
3612-1.0um     3612-1.6um     SPR220-3um
9871                16599                29806
9991                16665                29667
9861                16624                30183
9837                16597                29926
9890                16617                29771





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