Monthly HOtplates & ovens Calibration 10/12/04

[Eddy Mario Vilanova]

                                10/12/04
MONTHLY HOTPLATES & OVENS CALIBRATION
Svg Coater track # 1 HMDS -----> 125oC -----> Actual 124.6oC
Svg Coater Track # 2 HMDS -----> 125oC -----> Actual 125.3oC
Svg COat Track # 1 Post Bake ----> 90oC -----> Actual 90.1oC
Svg COat Track # 2 POst Bake ----> 90oC -----> Actual 89.8oC
********************************************************
Svg Developer Track # 1 110oC -----> Actual  110.1oC
Svg Developer Track # 2  110oC ---->  Actual  109.3oC
*********************************************************

POST EXPOSE HOTPLATE        =  115.oC ----->    115.3oC
POST EXPOSE HOTPLATE        =     90oC ---->   89.9oC
**********************************************************



DATA HOTPLATES ( 200oc Set Point )
1)  ( actual reading ) 200.5oC
2)  ( Actual reading ) 200.4oC
3) ( actual reading )  201.1oC
4) ( actual reading )  200.7oC
************************************************************



*****OVENS*****
90c Pre bake   -----         Actual 89.8
110c Post Bake -----      Actual 110.5
150c Singe  -----------       Actual 150.0
 

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/litho/attachments/20041013/71265089/attachment.html>