AM Daily Report 10/14/04

Eddy Mario Vilanova vilanova at snf.stanford.edu
Thu Oct 14 08:44:12 PDT 2004


PHOTO EQUIPMENT STATUS
                    10/14/04
AFM2.....................
BLUE M.................
DEKTAK CLEAN...
DEKTAK AU..........
DNSCOAT..............
DSNDEV.................
ELLIPSOMETER.....
ELP1........................
ELP2........................
EVALIGN.................
EVBOND..................
LAURELL................
HEADWAY2.............
KARLSUSS...............
KARLSUSS2.............
KSBONDER.............shutdown damaged bond tool.
LITHOSOLV.............
MASKSCRUB...........
NANO1.....................
NANO2.....................
NIKON......................problem wafer flat finder
NIKON2.....................
SVGCOAT.................
SVGCOAT2................
SVGDEV....................
SVGDEV2...................
ULTRATECH.............
ULTRATECH2...........problem broken ref reticle.
UVCURE.....................
WBMISCRES...............
YES OVEN...................
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/litho/attachments/20041014/8d8075ac/attachment.html>


More information about the litho mailing list