MONTHLY HOTPLATES AND OVENS CALIBRATION

Eddy Mario Vilanova vilanova at snf.stanford.edu
Thu Sep 9 11:14:32 PDT 2004


                            9/9/04
    MONTHLY HOTPLATES  & OVENS
                    CALIBRATION

                                  SET  POINT          ACTUAL
SVGCOAT  I  HMDS  Hotplate  = 125oC -------------------->   124.0 oC
SVGCOAT II  HMDS  Hotplate =  125oC -------------------->   124.5 oC

SVGCOAT 1  POST BAKE  Plate = 90oC -------------------->    90.0oC
SVGCOAT II POST BAKE  Plate = 90oC --------------------->   92.0 oC

DEVELOPER I HOTPLATE        = 110oC -------------------->    110.3oC
DEVELOPER II HOTPLATE      =  110oC -------------------->    109.0oC

POST EXPOSE HOTPLATE        =  115.oC ------------------->    116.4oC
POST EXPOSE HOTPLATE        =     90oC ------------------->       88.7oC

DATA HOTPLATES ( 200oc Set Point )
1)  ( actual reading ) 202.3oC
2)  ( Actual reading ) 201.1oC
3) ( actual reading ) 201.7oC
4) ( actual reading ) 198.6oC

*****OVENS*****
90c Pre bake   -----         Actual 90.1.
110c Post Bake -----      Actual 110
150c Singe  -----------       Actual 151.4

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