AM Daily Report 9/20/04

Eddy Mario Vilanova vilanova at snf.stanford.edu
Mon Sep 20 07:41:55 PDT 2004




>
>
>                        PHOTO EQUIPMENT STATUS
>                                9/20/04
>
AFM2.....................needs to be tested to clear problem
BLUE M.................
DEKTAK CLEAN...
DEKTAK AU..........
DNSCOAT..............
DSNDEV.................
ELLIPSOMETER.....
ELP1........................
ELP2........................
EVALIGN.................
EVBOND..................problem. flags won't pull. parts on order
LAURELL................
HEADWAY2.............
KARLSUSS...............
KARLSUSS2............. available for limited use.
KSBONDER..............problem temp overshoot
LITHOSOLV.............
MASKSCRUB...........
NANO1.....................
NANO2.....................
NIKON......................problem. reticle loading and flat finder
problem
NIKON2.....................
SVGCOAT.................
SVGCOAT2................
SVGDEV....................
SVGDEV2...................
ULTRATECH.............
ULTRATECH2............
UVCURE.....................
WBMISCRES...............
YES OVEN...................

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