Am Daily Report 9/21/04

Eddy Mario Vilanova vilanova at snf.stanford.edu
Tue Sep 21 08:55:21 PDT 2004




>  PHOTO EQUIPMENT STATUS
> >                                9/21/04
> >
> AFM2.....................needs to be tested to clear problem
> BLUE M.................
> DEKTAK CLEAN...
> DEKTAK AU..........
> DNSCOAT..............
> DSNDEV.................
> ELLIPSOMETER.....
> ELP1........................
> ELP2........................
> EVALIGN.................
> EVBOND..................Shutdown- Top Heater not working
> LAURELL................
> HEADWAY2.............
> KARLSUSS...............
> KARLSUSS2............. available for limited use.
> KSBONDER..............problem temp overshoot
> LITHOSOLV.............
> MASKSCRUB...........
> NANO1.....................
> NANO2.....................
> NIKON......................problem. reticle loading and flat finder
> problem
> NIKON2.....................
> SVGCOAT.................
> SVGCOAT2................
> SVGDEV....................
> SVGDEV2...................
> ULTRATECH.............
> ULTRATECH2............
> UVCURE.....................
> WBMISCRES...............
> YES OVEN...................
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