litho 8/1/05

mike martinez martinez at snf.stanford.edu
Mon Aug 1 08:09:14 PDT 2005


> Litho Tools Status
> 8/1/05
>
> AFM.........................
> BLUE M...................
> DEKTAK CLEAN.....
> DEKTAK AU............
> DNS..........................
> ELLIPSOMETER......
> ELP1.........................
> ELP2.........................
> EVALIGN..................problem. wafer shift
> EVIMPRINT.............. wafer chuck flags are working now
> EVBOND...................
> FUSION.....................
> LAURELL L...............
> LAURELL R...............
> HEADWAY2...............
> KARLSUSS................. problem. system frozen
> KARLSUSS2...............
> KSBONDER................
> LITHOSOLV...............
> MASKSCRUB.............
> NANO1.......................
> NANO2.......................
> NIKON.......................
> NIKON 9.....................
> SVGCOAT................... problem. indexer problem
> SVGCOAT2.................
> SVGDEV......................
> SVGDEV2.....................
> ULTRATECH...............
> ULTRATECH2..............
> UVCURE.......................
> WBMISCRES.................
> YES OVEN.....................
>  
>

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