litho 8/15/05

mike martinez martinez at snf.stanford.edu
Mon Aug 15 08:11:44 PDT 2005


> Litho Tools Status
> 8/15/05
>
> AFM......................... problem. no white light
> BLUE M...................
> DEKTAK CLEAN.....
> DEKTAK AU............
> DNS..........................
> ELLIPSOMETER......
> ELP1.........................
> ELP2.........................
> EVALIGN.................. shutdown. wec replacement/lamp house home 
> sensor replacement
> EVIMPRINT..............
> EVBOND...................
> FUSION.....................
> LAURELL L...............
> LAURELL R...............
> HEADWAY2...............
> KARLSUSS.................
> KARLSUSS2...............
> KSBONDER................
> LITHOSOLV...............
> MASKSCRUB.............
> NANO1.......................
> NANO2.......................
> NIKON....................... problem. flat finder error on wafer loader
> NIKON 9.....................
> SVGCOAT...................
> SVGCOAT2.................
> SVGDEV......................
> SVGDEV2.....................
> ULTRATECH...............
> ULTRATECH2..............
> UVCURE.......................
> WBMISCRES.................
> YES OVEN.....................
>  
>

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