Daily Report 8/22/05

[Eddy VIlanova]

Litho Tools Status
8/22/05

AFM......................... Problem - Waiting For lamp power Supply
BLUE M...................
DEKTAK CLEAN.....
DEKTAK AU............
DNS..........................
ELLIPSOMETER......
ELP1.........................
ELP2.........................
EVALIGN..................problem. wafer shift
EVIMPRINT..............
EVBOND...................
FUSION.....................
LAURELL L...............
LAURELL R...............
HEADWAY2...............
KARLSUSS.................
KARLSUSS2...............
KSBONDER................
LITHOSOLV...............
MASKSCRUB.............
NANO1.......................
NANO2.......................
NIKON....................
NIKON 9.....................
SVGCOAT...................
SVGCOAT2.................
SVGDEV......................
SVGDEV2.....................
ULTRATECH...............
ULTRATECH2..............
UVCURE.......................
WBMISCRES.................