Daily Report 8/22/05

Eddy VIlanova Vilanova at snf.stanford.edu
Mon Aug 22 08:05:24 PDT 2005


Litho Tools Status
8/22/05

AFM......................... Problem - Waiting For lamp power Supply
BLUE M...................
DEKTAK CLEAN.....
DEKTAK AU............
DNS..........................
ELLIPSOMETER......
ELP1.........................
ELP2.........................
EVALIGN..................problem. wafer shift
EVIMPRINT..............
EVBOND...................
FUSION.....................
LAURELL L...............
LAURELL R...............
HEADWAY2...............
KARLSUSS.................
KARLSUSS2...............
KSBONDER................
LITHOSOLV...............
MASKSCRUB.............
NANO1.......................
NANO2.......................
NIKON....................
NIKON 9.....................
SVGCOAT...................
SVGCOAT2.................
SVGDEV......................
SVGDEV2.....................
ULTRATECH...............
ULTRATECH2..............
UVCURE.......................
WBMISCRES.................





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