resist thickness readings 8/23/05

mike martinez martinez at snf.stanford.edu
Tue Aug 23 16:45:32 PDT 2005


svgcoat                          t                                   
c                               b                              
l                              r
1.0um                         10400                          
10331                       10381                     
10397                     10386
1.6um                         16076                          
16603                       16186                     
16073                     16984
7.0um                         71124                          
69686                       70996                     
71200                     71385

svgcoat2                    
1.0um                         10205                          
10138                       10155                    
10185                       10197
1.6um                         16740                          
16757                       16765                    
16756                       16765
3.0um                         31965                          
31714                       31251                    
31676                       31521




More information about the litho mailing list