AM Litho DaiLy Report 2/25/05

Eddy VIlanova vilanova at snf.stanford.edu
Fri Feb 25 07:10:46 PST 2005


Mike Martinez wrote:

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> Litho Tools Status
> 2/25/05
>
> AFM.........................
> BLUE M...................
> DEKTAK CLEAN.....
> DEKTAK AU............
> DNS..........................
> ELLIPSOMETER......
> ELP1.........................
> ELP2.........................
> EVALIGN.................. Problem ---- Left BSA Z Travel
> EVIMPRINT..............
> EVBOND...................
> FUSION.....................
> LAURELL L...............
> LAURELL R...............
> HEADWAY2...............
> KARLSUSS.................
> KARLSUSS2...............
> KSBONDER................ Problem ------- Need Chamber Cleaning
> LITHOSOLV...............
> MASKSCRUB.............
> NANO1.......................
> NANO2.......................
> NIKON.......................
> NIKON 9.....................
> SVGCOAT...................
> SVGCOAT2.................
> SVGDEV......................
> SVGDEV2.....................
> ULTRATECH...............
> ULTRATECH2.............. Shutdown ------ Bad Lamp  Power Supply
> UVCURE.......................
> WBMISCRES.................
> YES OVEN.....................
>  
>




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