HOtplates Monthly calibration

[Eddy Vilanova]

                 1/25/05
-Post Expose Hot Plate-
90C   Post Expose Hot Plate  =  90.5C
115C  Post Expose Hot Plate  =  116.1C

          -SVG Tracks-
SVG Coat Track 1 HMDS Hot Plate  =  125.C  Post Bake Hot Plate  = 89.1C
SVG Coat Track 2 HMDS Hot Plate  =  124.5C  Post Bake Hot Plate  = 91.4C
SVG Develop Track 1 Hot Plate  =  108.8C
SVG Develop Track 2 Hot Plate  =  110.7C
Data hotplates
1) set point 200oc after calibration =    201.2oC
2) Set POint 200oC After Calibration = 200.7oC
3) Set POint 200oC After Calibration = 201.7oC
4) Set pOint 200oC After Calibration = 202.2 oC
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