Litho daily report 7/5/05

Eddy VIlanova Vilanova at snf.stanford.edu
Tue Jul 5 08:39:38 PDT 2005


Litho Tools Status
7/05/05

AFM.........................
BLUE M...................
DEKTAK CLEAN.....
DEKTAK AU............
DNS..........................
ELLIPSOMETER......
ELP1.........................
ELP2.........................
EVALIGN..................
EVIMPRINT..............
EVBOND...................
FUSION.....................
LAURELL L...............
LAURELL R...............
HEADWAY2...............
KARLSUSS.................
KARLSUSS2...............
KSBONDER................
LITHOSOLV...............
MASKSCRUB.............
NANO1.......................
NANO2.......................
NIKON.....................
NIKON 9.....................
SVGCOAT................... Problem - Broken HMDS Rail MOtor.
SVGCOAT2.................
SVGDEV......................
SVGDEV2.....................
ULTRATECH............... shutdown. power supply
ULTRATECH2..............
UVCURE.......................
WBMISCRES.................
YES OVEN.....................





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