From martinez at snf.stanford.edu Thu Jun 2 08:11:08 2005 From: martinez at snf.stanford.edu (mike martinez) Date: Thu, 02 Jun 2005 08:11:08 -0700 Subject: litho 6/2/05 In-Reply-To: <41DF26F0.F6475255@snf.stanford.edu> References: <41DF26F0.F6475255@snf.stanford.edu> Message-ID: <429F218C.8020508@snf.stanford.edu> > Litho Tools Status > 6/2/05 > > AFM......................... > BLUE M................... > DEKTAK CLEAN..... > DEKTAK AU............ > DNS.......................... > ELLIPSOMETER...... > ELP1......................... > ELP2......................... > EVALIGN.................. > EVIMPRINT.............. > EVBOND................... > FUSION..................... > LAURELL L............... > LAURELL R............... > HEADWAY2............... > KARLSUSS................. > KARLSUSS2............... > KSBONDER................ > LITHOSOLV............... > MASKSCRUB............. > NANO1....................... > NANO2....................... > NIKON......................needs reticle blinds adjustment. > NIKON 9..................... > SVGCOAT................... > SVGCOAT2................. > SVGDEV...................... > SVGDEV2..................... > ULTRATECH............... shutdown. x-y stage problem > ULTRATECH2.............. > UVCURE....................... > WBMISCRES................. > YES OVEN..................... > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Fri Jun 3 08:06:51 2005 From: martinez at snf.stanford.edu (mike martinez) Date: Fri, 03 Jun 2005 08:06:51 -0700 Subject: litho 6/3/05 In-Reply-To: <41DF26F0.F6475255@snf.stanford.edu> References: <41DF26F0.F6475255@snf.stanford.edu> Message-ID: <42A0720B.5080904@snf.stanford.edu> > Litho Tools Status > 6/3/05 > > AFM......................... > BLUE M................... > DEKTAK CLEAN..... > DEKTAK AU............ > DNS.......................... > ELLIPSOMETER...... > ELP1......................... > ELP2......................... > EVALIGN.................. > EVIMPRINT.............. > EVBOND................... > FUSION..................... > LAURELL L............... > LAURELL R............... > HEADWAY2............... > KARLSUSS................. > KARLSUSS2............... > KSBONDER................ > LITHOSOLV............... > MASKSCRUB............. > NANO1....................... > NANO2....................... > NIKON......................needs reticle blinds adj. > NIKON 9..................... > SVGCOAT................... > SVGCOAT2................. > SVGDEV...................... problem. broken back side rinse nozzle > SVGDEV2..................... > ULTRATECH............... > ULTRATECH2.............. > UVCURE....................... > WBMISCRES................. > YES OVEN..................... > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Mon Jun 6 08:04:08 2005 From: martinez at snf.stanford.edu (mike martinez) Date: Mon, 06 Jun 2005 08:04:08 -0700 Subject: litho 6/6/05 In-Reply-To: <41DF26F0.F6475255@snf.stanford.edu> References: <41DF26F0.F6475255@snf.stanford.edu> Message-ID: <42A465E8.30505@snf.stanford.edu> > Litho Tools Status > 6/6/05 > > AFM......................... > BLUE M................... > DEKTAK CLEAN..... > DEKTAK AU............ > DNS.......................... > ELLIPSOMETER...... > ELP1......................... > ELP2......................... > EVALIGN.................. > EVIMPRINT.............. > EVBOND................... > FUSION..................... > LAURELL L............... > LAURELL R............... > HEADWAY2............... > KARLSUSS................. > KARLSUSS2............... > KSBONDER................ > LITHOSOLV............... > MASKSCRUB............. > NANO1....................... > NANO2....................... > NIKON......................needs reticle blinds adjustment. > NIKON 9..................... > SVGCOAT................... > SVGCOAT2................. > SVGDEV...................... > SVGDEV2..................... > ULTRATECH............... > ULTRATECH2.............. > UVCURE....................... > WBMISCRES................. > YES OVEN..................... > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Tue Jun 7 08:06:05 2005 From: martinez at snf.stanford.edu (mike martinez) Date: Tue, 07 Jun 2005 08:06:05 -0700 Subject: litho 6/7/05 In-Reply-To: <41DF26F0.F6475255@snf.stanford.edu> References: <41DF26F0.F6475255@snf.stanford.edu> Message-ID: <42A5B7DD.9090606@snf.stanford.edu> > Litho Tools Status > 6/7/05 > > AFM......................... > BLUE M................... > DEKTAK CLEAN..... > DEKTAK > AU............ > all green lights in litho today > DNS.......................... > ELLIPSOMETER...... > ELP1......................... > ELP2......................... > EVALIGN.................. > EVIMPRINT.............. > EVBOND................... > FUSION..................... > LAURELL L............... > LAURELL R............... > HEADWAY2............... > KARLSUSS................. > KARLSUSS2............... > KSBONDER................ > LITHOSOLV............... > MASKSCRUB............. > NANO1....................... > NANO2....................... > NIKON....................... > NIKON 9..................... > SVGCOAT................... > SVGCOAT2................. > SVGDEV...................... > SVGDEV2..................... > ULTRATECH............... > ULTRATECH2.............. > UVCURE....................... > WBMISCRES................. > YES OVEN..................... > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From attn_henry at zipmail.com.br Tue Jun 7 19:13:06 2005 From: attn_henry at zipmail.com.br (HENRY OKOYE) Date: Tue, 7 Jun 2005 19:13:06 -0700 Subject: SCADSA Message-ID: Dear Sir, Greetings, I am Mr.Henry Okoye the Account Manager of Late Mr. Morris Thompson in Standard Trust Bank Regional Office in Victoria island, here in Lagos. However I got your contact through the International web directory.I decided to contact you by email because I feel that it is more secured and private. Recently we discovered a Dormant Account with a huge amount of Money Valued USD35,000,000.00 (Thirty Five Million Dollars only)that belongs to one of our late Customer who died in a plane crash .During our investigation and auditing in this bank, my department came across a very huge sum of money belonging to Late Mr. Morris Thompson an American great industrialist and a resident of Alaska, who unfortunately lost his life in the plane crash of Alaska Airlines Flight 261 which crashed on January 31 2000,including his wife and only daughter. You shall read more news about the crash on visiting this site which I got during my investigation; http://www.cnn.com/2000/US/02/01/alaska.airlines.list/ and http://www.nativefederation.org/history/people/mThompson.html The fund has been dormant in his account With this Bank without any claim of the funds in our custody either from his family or relation before our discovery of this development. The Banking law here stipulates that if such money remains unclaimed for Six years, it will be forfeited to the Bank treasury as an unclaimed bill.It is only a foreigner that can stand as a next of kin and It is upon this discovery that I decided to contact you to collaborate with you to pull out this dormant fund. In order to avert this negative development, I on behalf of my trusted colleagues now seek your permission to have you stand in as next of kin to Our late Customer so that the fund will be released and paid into your account as the beneficiary?s next of kin now that the bank is still expecting a next of kin or relative of the deceased ,Late Mr. Morris Thompson. In fact we could have done this deal alone but because of our position in this country as civil servants, we are not allowed to operate a foreign account and that would eventually raise an eye brow on our side during the time of transfer since we still work in this bank, this is the actual reason why we required a second party or fellow who will assist us forward claims as the next of kin and also provide either an existing bank account or to set up a new Bank a/c immediately to receive this fund, even an empty a/c can also serve for this purpose. On smooth conclusion of this transaction, you will be entitled to 40% as gratification for your assisting us, and the remaining 60% will be for me and my partners. What I want from you is for you to act as the deceased next of kin. I have in my possession, all the necessary Documents to successfully accomplish the operation. Bear in mind that this proposal is 100% risk free. Further Information will be given to you as soon as I receive your positive response. I suggest you get back to me as soon as possible stating your wish. Find in the attachment of my Family Picture, to proof who I am. I await your Urgent Responce Regrads, Mr.Henry Okoye From attn_henry at zipmail.com.br Wed Jun 8 14:21:22 2005 From: attn_henry at zipmail.com.br (Mr.Henry Okoye) Date: Wed, 8 Jun 2005 14:21:22 -0700 Subject: SCADSA Message-ID: Dear Sir, Greetings, I am Mr.Henry Okoye the Account Manager of Late Mr. Morris Thompson in Standard Trust Bank Regional Office in Victoria island, here in Lagos. However I got your contact through the International web directory.I decided to contact you by email because I feel that it is more secured and private. Recently we discovered a Dormant Account with a huge amount of Money Valued USD35,000,000.00 (Thirty Five Million Dollars only)that belongs to one of our late Customer who died in a plane crash .During our investigation and auditing in this bank, my department came across a very huge sum of money belonging to Late Mr. Morris Thompson an American great industrialist and a resident of Alaska, who unfortunately lost his life in the plane crash of Alaska Airlines Flight 261 which crashed on January 31 2000,including his wife and only daughter. You shall read more news about the crash on visiting this site which I got during my investigation; http://www.cnn.com/2000/US/02/01/alaska.airlines.list/ and http://www.nativefederation.org/history/people/mThompson.html The fund has been dormant in his account With this Bank without any claim of the funds in our custody either from his family or relation before our discovery of this development. The Banking law here stipulates that if such money remains unclaimed for Six years, it will be forfeited to the Bank treasury as an unclaimed bill.It is only a foreigner that can stand as a next of kin and It is upon this discovery that I decided to contact you to collaborate with you to pull out this dormant fund. In order to avert this negative development, I on behalf of my trusted colleagues now seek your permission to have you stand in as next of kin to Our late Customer so that the fund will be released and paid into your account as the beneficiary?s next of kin now that the bank is still expecting a next of kin or relative of the deceased ,Late Mr. Morris Thompson. In fact we could have done this deal alone but because of our position in this country as civil servants, we are not allowed to operate a foreign account and that would eventually raise an eye brow on our side during the time of transfer since we still work in this bank, this is the actual reason why we required a second party or fellow who will assist us forward claims as the next of kin and also provide either an existing bank account or to set up a new Bank a/c immediately to receive this fund, even an empty a/c can also serve for this purpose. On smooth conclusion of this transaction, you will be entitled to 40% as gratification for your assisting us, and the remaining 60% will be for me and my partners. What I want from you is for you to act as the deceased next of kin. I have in my possession, all the necessary Documents to successfully accomplish the operation. Bear in mind that this proposal is 100% risk free. Further Information will be given to you as soon as I receive your positive response. I suggest you get back to me as soon as possible stating your wish. Find in the attachment of my Family Picture, to proof who I am. I await your Urgent Responce Regrads, Mr.Henry Okoye From Vilanova at snf.stanford.edu Wed Jun 8 15:00:00 2005 From: Vilanova at snf.stanford.edu (Eddy VIlanova) Date: Wed, 08 Jun 2005 15:00:00 -0700 Subject: Monthly Hotplates and Ovens Calibration Readings. Message-ID: <42A76A60.8040901@snf.stanford.edu> * Hotplates & Ovens Temperature Readings 6/8/05 * *Svg Coat HMDS Hotplate 125oC - Reading After Calibration 122.3oC Svg Coat II HMDS Hotplate 125oC - Reading After Calibration 124.7oC Svg Coat Post Bake Hotplate 90oC - Reading After Calibration 88.5oC Svg Coat Post Bake Hotplate 90oC - Reading After Calibraton 90.7oC SVG DeveloperHotplate 110oC After Calibration 110.7oC SVG Developer II Hotplate 110oC After Calibration 109.0oC Post Expose Bake Plate 115oC - Reading After Calibraton 114.2oC Post Expose Bake Plate 90oC - Reading After Calibraton 89.6oC Pre - Bake Oven 90oC - Reading After Calibration = 89.1oC Post - Bake Oven 110oC - Reading After Calibration = 109.3.oC Singe Oven 150oC - Reading After Calibraton = 149.6oC * From martinez at snf.stanford.edu Wed Jun 8 16:18:09 2005 From: martinez at snf.stanford.edu (mike martinez) Date: Wed, 08 Jun 2005 16:18:09 -0700 Subject: resist thickness readings 6/8/05 In-Reply-To: <42A77804.8040902@snf.stanford.edu> References: <42A77804.8040902@snf.stanford.edu> Message-ID: <42A77CB1.1050406@snf.stanford.edu> > svgcoat top center > bottom left right > 1.0um 10378 10227 > 10323 10365 10360 > 1.6um 16970 16817 > 16891 16924 16948 > 7.0um 73108 72283 > 72956 73295 73146 > > svgcoat2 > 1.0um 10099 10049 > 10094 10104 10094 > 1.6um 16627 16608 > 16604 16619 16638 > 3.0um 28961 28592 > 28856 28882 28898 > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Thu Jun 9 08:04:02 2005 From: martinez at snf.stanford.edu (mike martinez) Date: Thu, 09 Jun 2005 08:04:02 -0700 Subject: litho 6/9/05 In-Reply-To: <41DF26F0.F6475255@snf.stanford.edu> References: <41DF26F0.F6475255@snf.stanford.edu> Message-ID: <42A85A62.4040405@snf.stanford.edu> > Litho Tools Status > 6/9/05 > > AFM......................... > BLUE M................... > DEKTAK CLEAN..... > DEKTAK AU............ > DNS.......................... > ELLIPSOMETER...... > ELP1......................... > ELP2......................... > EVALIGN.................. > EVIMPRINT.............. > EVBOND................... > FUSION..................... > LAURELL L............... > LAURELL R............... > HEADWAY2............... > KARLSUSS................. > KARLSUSS2............... > KSBONDER................ > LITHOSOLV............... > MASKSCRUB............. > NANO1....................... > NANO2....................... > NIKON....................... > NIKON 9..................... > SVGCOAT................... intermittent vapor prime temp overshoot > SVGCOAT2................. > SVGDEV...................... > SVGDEV2..................... > ULTRATECH............... > ULTRATECH2.............. > UVCURE....................... > WBMISCRES................. > YES OVEN..................... > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From Vilanova at snf.stanford.edu Fri Jun 10 07:10:24 2005 From: Vilanova at snf.stanford.edu (Eddy VIlanova) Date: Fri, 10 Jun 2005 07:10:24 -0700 Subject: Litho Daily AM Report 6/10/05 Message-ID: <42A99F50.2030605@snf.stanford.edu> > > Litho Tools Status > 6/10/05 > > AFM......................... > BLUE M................... > DEKTAK CLEAN..... > DEKTAK AU............ > DNS.......................... > ELLIPSOMETER...... > ELP1......................... > ELP2......................... > EVALIGN.................. > EVIMPRINT.............. > EVBOND................... > FUSION..................... > LAURELL L............... > LAURELL R............... > HEADWAY2............... > KARLSUSS................. > KARLSUSS2............... > KSBONDER................ > LITHOSOLV............... > MASKSCRUB............. > NANO1....................... > NANO2....................... > NIKON....................... > NIKON 9..................... > SVGCOAT.................. > SVGCOAT2................. > SVGDEV...................... > SVGDEV2..................... > ULTRATECH............... > ULTRATECH2.............. > UVCURE....................... > WBMISCRES................. > YES OVEN..................... > > From martinez at snf.stanford.edu Mon Jun 13 08:08:48 2005 From: martinez at snf.stanford.edu (mike martinez) Date: Mon, 13 Jun 2005 08:08:48 -0700 Subject: litho 6/13/05 In-Reply-To: <41DF26F0.F6475255@snf.stanford.edu> References: <41DF26F0.F6475255@snf.stanford.edu> Message-ID: <42ADA180.9080503@snf.stanford.edu> > Litho Tools Status > 6/13/05 > > AFM......................... > BLUE M................... > DEKTAK CLEAN..... > DEKTAK AU............ all > green lights in litho today > DNS.......................... > ELLIPSOMETER...... > ELP1......................... > ELP2......................... > EVALIGN.................. > EVIMPRINT.............. > EVBOND................... > FUSION..................... > LAURELL L............... > LAURELL R............... > HEADWAY2............... > KARLSUSS................. > KARLSUSS2............... > KSBONDER................ > LITHOSOLV............... > MASKSCRUB............. > NANO1....................... > NANO2....................... > NIKON....................... > NIKON 9..................... > SVGCOAT................... > SVGCOAT2................. > SVGDEV...................... > SVGDEV2..................... > ULTRATECH............... > ULTRATECH2.............. > UVCURE....................... > WBMISCRES................. > YES OVEN..................... > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Mon Jun 13 16:38:08 2005 From: martinez at snf.stanford.edu (mike martinez) Date: Mon, 13 Jun 2005 16:38:08 -0700 Subject: : resist thickness readings 6/13/05 In-Reply-To: <42A77804.8040902@snf.stanford.edu> References: <42A77804.8040902@snf.stanford.edu> Message-ID: <42AE18E0.1080800@snf.stanford.edu> > svgcoat top center > bottom left right > 1.0um 10205 10063 > 10173 10251 10225 > 1.6um 16917 16873 > 16805 16864 16893 > 7.0um 72697 72190 72593 > 72576 72692 > > svgcoat2 > 1.0um 11623 11549 > 11630 11641 11633 > 1.6um 16539 16536 > 16494 16528 16536 > 3.0um 29007 29148 > 29661 29352 29063 > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Tue Jun 14 08:12:26 2005 From: martinez at snf.stanford.edu (mike martinez) Date: Tue, 14 Jun 2005 08:12:26 -0700 Subject: litho 6/14/05 In-Reply-To: <41DF26F0.F6475255@snf.stanford.edu> References: <41DF26F0.F6475255@snf.stanford.edu> Message-ID: <42AEF3DA.8000908@snf.stanford.edu> > Litho Tools Status > 6/14/05 > > AFM......................... > BLUE M................... > DEKTAK CLEAN..... > DEKTAK AU............ > DNS.......................... > ELLIPSOMETER...... > ELP1......................... > ELP2......................... > EVALIGN.................. > EVIMPRINT.............. > EVBOND................... > FUSION..................... > LAURELL L............... > LAURELL R............... > HEADWAY2............... > KARLSUSS................. > KARLSUSS2............... > KSBONDER................ > LITHOSOLV............... > MASKSCRUB............. > NANO1....................... > NANO2....................... > NIKON....................... > NIKON 9..................... > SVGCOAT................... > SVGCOAT2................. > SVGDEV...................... > SVGDEV2..................... > ULTRATECH............... > ULTRATECH2.............shutdown. x servo motor problem > UVCURE....................... > WBMISCRES................. > YES OVEN..................... > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Thu Jun 16 08:09:39 2005 From: martinez at snf.stanford.edu (mike martinez) Date: Thu, 16 Jun 2005 08:09:39 -0700 Subject: litho 6/16/05 In-Reply-To: <41DF26F0.F6475255@snf.stanford.edu> References: <41DF26F0.F6475255@snf.stanford.edu> Message-ID: <42B19633.5020407@snf.stanford.edu> > Litho Tools Status > 6/16/05 > > AFM......................... > BLUE M................... > DEKTAK CLEAN..... > DEKTAK AU............ > DNS.......................... > ELLIPSOMETER...... > ELP1......................... > ELP2......................... > EVALIGN.................. > EVIMPRINT.............. > EVBOND................... > FUSION..................... > LAURELL L............... > LAURELL R............... > HEADWAY2............... > KARLSUSS................. > KARLSUSS2............... > KSBONDER................ > LITHOSOLV............... > MASKSCRUB............. > NANO1....................... > NANO2....................... > NIKON....................... > NIKON 9..................... > SVGCOAT................... > SVGCOAT2................. > SVGDEV...................... > SVGDEV2..................... > ULTRATECH..............shutdown. bad stage driver pcb > ULTRATECH2.............. problem. won't load reticle > UVCURE....................... > WBMISCRES................. > YES OVEN..................... > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Mon Jun 20 08:07:50 2005 From: martinez at snf.stanford.edu (mike martinez) Date: Mon, 20 Jun 2005 08:07:50 -0700 Subject: litho 6/20/05 In-Reply-To: <41DF26F0.F6475255@snf.stanford.edu> References: <41DF26F0.F6475255@snf.stanford.edu> Message-ID: <42B6DBC6.8090409@snf.stanford.edu> > Litho Tools Status > 6/20/05 > > AFM......................... > BLUE M................... > DEKTAK CLEAN..... > DEKTAK AU............ > DNS.......................... > ELLIPSOMETER...... > ELP1......................... > ELP2......................... > EVALIGN.................. > EVIMPRINT.............. > EVBOND................... > FUSION..................... > LAURELL L............... > LAURELL R............... > HEADWAY2............... > KARLSUSS................. > KARLSUSS2............... > KSBONDER................ > LITHOSOLV............... > MASKSCRUB............. > NANO1....................... > NANO2....................... > NIKON....................... > NIKON 9..................... > SVGCOAT................... > SVGCOAT2................. > SVGDEV...................... > SVGDEV2..................... > ULTRATECH..............shutdown. x-y stage problem > ULTRATECH2.............. > UVCURE....................... > WBMISCRES................. > YES OVEN..................... > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Mon Jun 20 18:38:24 2005 From: nanotech at nsti.org (NSTI) Date: Mon, 20 Jun 2005 18:38:24 -0700 Subject: Nanotech 2005 CDROM Now Available Message-ID: An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Thu Jun 23 08:03:23 2005 From: martinez at snf.stanford.edu (mike martinez) Date: Thu, 23 Jun 2005 08:03:23 -0700 Subject: litho 6/23 In-Reply-To: <41DF26F0.F6475255@snf.stanford.edu> References: <41DF26F0.F6475255@snf.stanford.edu> Message-ID: <42BACF3B.9040003@snf.stanford.edu> > Litho Tools Status > 6/23/05 > > AFM......................... > BLUE M................... > DEKTAK CLEAN..... > DEKTAK AU............ > DNS.......................... > ELLIPSOMETER...... > all green in litho > ELP1......................... > ELP2......................... > EVALIGN.................. > EVIMPRINT.............. > EVBOND................... > FUSION..................... > LAURELL L............... > LAURELL R............... > HEADWAY2............... > KARLSUSS................. > KARLSUSS2............... > KSBONDER................ > LITHOSOLV............... > MASKSCRUB............. > NANO1....................... > NANO2....................... > NIKON....................... > NIKON 9..................... > SVGCOAT................... > SVGCOAT2................. > SVGDEV...................... > SVGDEV2..................... > ULTRATECH............... > ULTRATECH2.............. > UVCURE....................... > WBMISCRES................. > YES OVEN..................... > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Fri Jun 24 08:08:56 2005 From: martinez at snf.stanford.edu (mike martinez) Date: Fri, 24 Jun 2005 08:08:56 -0700 Subject: litho 6/24/05 In-Reply-To: <41DF26F0.F6475255@snf.stanford.edu> References: <41DF26F0.F6475255@snf.stanford.edu> Message-ID: <42BC2208.4080001@snf.stanford.edu> > Litho Tools Status > 6/24/05 > > AFM......................... > BLUE M................... > DEKTAK CLEAN..... > DEKTAK AU............ > DNS.......................... > ELLIPSOMETER...... > ELP1......................... > ELP2......................... > EVALIGN.................. > EVIMPRINT.............. > EVBOND................... > FUSION..................... > LAURELL L............... > LAURELL R............... > HEADWAY2............... > KARLSUSS................. > KARLSUSS2............... > KSBONDER................ > LITHOSOLV............... > MASKSCRUB............. > NANO1....................... > NANO2....................... > NIKON....................... > NIKON 9..................... > SVGCOAT..................pico track field service due in this a.m. to > calibrate hp temp controller . > SVGCOAT2................. > SVGDEV...................... > SVGDEV2..................... > ULTRATECH............... > ULTRATECH2.............. > UVCURE....................... > WBMISCRES................. > YES OVEN..................... > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Mon Jun 27 08:03:13 2005 From: martinez at snf.stanford.edu (mike martinez) Date: Mon, 27 Jun 2005 08:03:13 -0700 Subject: litho 6/27/05 In-Reply-To: <41DF26F0.F6475255@snf.stanford.edu> References: <41DF26F0.F6475255@snf.stanford.edu> Message-ID: <42C01531.1020702@snf.stanford.edu> > Litho Tools Status > 6/27/05 > > AFM......................... > BLUE M................... > DEKTAK CLEAN..... > DEKTAK AU............ > DNS.......................... > ELLIPSOMETER...... > ELP1......................... > ELP2......................... > EVALIGN.................. > EVIMPRINT.............. > EVBOND................... > FUSION..................... > LAURELL L............... > LAURELL R............... > HEADWAY2............... > KARLSUSS................. > KARLSUSS2............... > KSBONDER................ > LITHOSOLV............... > MASKSCRUB............. > NANO1....................... > NANO2....................... > NIKON....................... > NIKON 9..................... > SVGCOAT................... > SVGCOAT2................. > SVGDEV...................... > SVGDEV2..................... > ULTRATECH..............problem. xy stage problem > ULTRATECH2.............. > UVCURE....................... > WBMISCRES................. > YES OVEN..................... > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Tue Jun 28 08:01:47 2005 From: martinez at snf.stanford.edu (mike martinez) Date: Tue, 28 Jun 2005 08:01:47 -0700 Subject: litho 6/28/05 In-Reply-To: <41DF26F0.F6475255@snf.stanford.edu> References: <41DF26F0.F6475255@snf.stanford.edu> Message-ID: <42C1665B.2030700@snf.stanford.edu> > Litho Tools Status > 6/28/05 > > AFM......................... > BLUE M................... > DEKTAK CLEAN..... > DEKTAK AU............ > DNS.......................... > ELLIPSOMETER...... > ELP1......................... > ELP2......................... > EVALIGN.................. > EVIMPRINT.............. > EVBOND................... > FUSION..................... > LAURELL L............... > LAURELL R............... > HEADWAY2............... > KARLSUSS................. > KARLSUSS2............... > KSBONDER................ > LITHOSOLV............... > MASKSCRUB............. > NANO1....................... > NANO2....................... > NIKON....................... > NIKON 9..................... > SVGCOAT................... > SVGCOAT2................. > SVGDEV...................... > SVGDEV2..................... > ULTRATECH..............shutdown. xy stage prob > ULTRATECH2.............. > UVCURE....................... > WBMISCRES................. > YES OVEN..................... > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Tue Jun 28 08:03:34 2005 From: martinez at snf.stanford.edu (mike martinez) Date: Tue, 28 Jun 2005 08:03:34 -0700 Subject: resist thickness 6/27/05 Message-ID: <42C166C6.3000908@snf.stanford.edu> -------- Original Message -------- Subject: resist thickness 6/27/05 Date: Mon, 27 Jun 2005 16:33:30 -0700 From: mike martinez To: mike martinez References: <42A77804.8040902 at snf.stanford.edu> > svgcoat top center > bottom left right > 1.0um 10175 10116 10167 > 10167 10180 > 1.6um 16681 16735 16643 > 16685 16694 > 7.0um 72618 72353 72345 > 72542 72776 > > svgcoat2 > 1.0um 11614 11574 11623 > 11618 11633 > 1.6um 16645 16580 16596 > 16592 16632 > 3.0um 29115 28674 28968 > 28965 28898 > ebr & uniformity look good on all wafers -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Wed Jun 29 08:09:21 2005 From: martinez at snf.stanford.edu (mike martinez) Date: Wed, 29 Jun 2005 08:09:21 -0700 Subject: litho 6/29/05 In-Reply-To: <41DF26F0.F6475255@snf.stanford.edu> References: <41DF26F0.F6475255@snf.stanford.edu> Message-ID: <42C2B9A1.4020709@snf.stanford.edu> > Litho Tools Status > 6/29/05 > > AFM......................... > BLUE M................... > DEKTAK CLEAN..... > DEKTAK AU............ > DNS.......................... > ELLIPSOMETER...... > ELP1......................... > ELP2......................... > EVALIGN.................. > EVIMPRINT.............. > EVBOND................... > FUSION..................... > LAURELL L............... > LAURELL R............... > HEADWAY2............... > KARLSUSS................. > KARLSUSS2............... > KSBONDER................ > LITHOSOLV............... > MASKSCRUB............. > NANO1....................... > NANO2....................... > NIKON....................... > NIKON 9..................... > SVGCOAT................... > SVGCOAT2................. > SVGDEV...................... > SVGDEV2..................... > ULTRATECH..............shutdown. bad 24v power supply > ULTRATECH2.............. > UVCURE....................... > WBMISCRES................. > YES OVEN..................... > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Thu Jun 30 08:12:40 2005 From: martinez at snf.stanford.edu (mike martinez) Date: Thu, 30 Jun 2005 08:12:40 -0700 Subject: litho 6/30/05 In-Reply-To: <41DF26F0.F6475255@snf.stanford.edu> References: <41DF26F0.F6475255@snf.stanford.edu> Message-ID: <42C40BE8.90707@snf.stanford.edu> > Litho Tools Status > 6/30/05 > > AFM......................... > BLUE M................... > DEKTAK CLEAN..... > DEKTAK AU............ > DNS.......................... > ELLIPSOMETER...... > ELP1......................... > ELP2......................... > EVALIGN.................. > EVIMPRINT.............. > EVBOND................... > FUSION..................... > LAURELL L............... > LAURELL R............... > HEADWAY2............... > KARLSUSS................. > KARLSUSS2............... > KSBONDER................ > LITHOSOLV............... > MASKSCRUB............. > NANO1....................... > NANO2....................... > NIKON......................problem. send cassette indexing problem > NIKON 9..................... > SVGCOAT................... > SVGCOAT2................. > SVGDEV...................... > SVGDEV2..................... > ULTRATECH............... shutdown. power supply > ULTRATECH2.............. > UVCURE....................... > WBMISCRES................. > YES OVEN..................... > > -------------- next part -------------- An HTML attachment was scrubbed... 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