resist thickness readings 6/8/05

mike martinez martinez at snf.stanford.edu
Wed Jun 8 16:18:09 PDT 2005


> svgcoat              top            center                  
> bottom               left                right
> 1.0um               10378          10227                   
> 10323              10365            10360
> 1.6um               16970          16817                   
> 16891              16924            16948
> 7.0um               73108          72283                   
> 72956              73295            73146
>
> svgcoat2           
> 1.0um               10099          10049                    
> 10094             10104            10094
> 1.6um               16627          16608                    
> 16604             16619            16638
> 3.0um               28961          28592                    
> 28856             28882            28898
>

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