resist thickness 6/27/05

mike martinez martinez at snf.stanford.edu
Tue Jun 28 08:03:34 PDT 2005



-------- Original Message --------
Subject: 	resist thickness 6/27/05
Date: 	Mon, 27 Jun 2005 16:33:30 -0700
From: 	mike martinez <martinez at snf.stanford.edu>
To: 	mike martinez <martinez at snf.stanford.edu>
References: 	<42A77804.8040902 at snf.stanford.edu>




> svgcoat              top            center                  
> bottom               left                right
> 1.0um               10175         10116                  10167         
>       10167             10180
> 1.6um               16681         16735                  16643         
>       16685             16694
> 7.0um               72618         72353                  72345         
>       72542             72776
>
> svgcoat2           
> 1.0um              11614          11574                  11623         
>       11618             11633
> 1.6um              16645          16580                  16596         
>       16592             16632
> 3.0um              29115          28674                  28968         
>       28965             28898
>
                                   ebr & uniformity look good on all wafers

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