From martinez at snf.stanford.edu  Tue Mar  1 08:11:09 2005
From: martinez at snf.stanford.edu (Mike Martinez)
Date: Tue, 01 Mar 2005 08:11:09 -0800
Subject: litho 3/1/05
References: <41DF26F0.F6475255@snf.stanford.edu>
Message-ID: <4224941C.4879DC1E@snf.stanford.edu>

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From martinez at snf.stanford.edu  Wed Mar  2 08:12:09 2005
From: martinez at snf.stanford.edu (Mike Martinez)
Date: Wed, 02 Mar 2005 08:12:09 -0800
Subject: litho 3/2/05
References: <41DF26F0.F6475255@snf.stanford.edu>
Message-ID: <4225E5D9.FFCC4776@snf.stanford.edu>

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From nanotech at nsti.org  Wed Mar  2 22:12:04 2005
From: nanotech at nsti.org (Nanotech Ventures 2005)
Date: Wed, 2 Mar 2005 22:12:04 -0800
Subject: Emerging Technology Company Showcase
Message-ID: <SPARKLIST-6212050-2229203-2005.03.02-22.17.09--litho#snf.stanford.edu@spirit.sparklist.com>

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From vilanova at snf.stanford.edu  Thu Mar  3 07:23:47 2005
From: vilanova at snf.stanford.edu (Eddy VIlanova)
Date: Thu, 03 Mar 2005 07:23:47 -0800
Subject: Litho AM Report 3/3/05
In-Reply-To: <421CA818.D0416BD7@snf.stanford.edu>
References: <421CA818.D0416BD7@snf.stanford.edu>
Message-ID: <42272C03.6040406@snf.stanford.edu>

:

>
> ------------------------------------------------------------------------
>
> Litho Tools Status
> 3/3/05
>
> AFM.........................
> BLUE M...................
> DEKTAK CLEAN.....
> DEKTAK AU............
> DNS..........................
> ELLIPSOMETER......
> ELP1.........................
> ELP2.........................
> EVALIGN.................. Problem - BSA left
> EVIMPRINT..............
> EVBOND................... Problem Chamber Clean
> FUSION.....................
> LAURELL L...............
> LAURELL R...............
> HEADWAY2...............
> KARLSUSS.................
> KARLSUSS2...............
> KSBONDER................
> LITHOSOLV...............
> MASKSCRUB.............
> NANO1.......................
> NANO2.......................
> NIKON.......................
> NIKON 9.....................
> SVGCOAT...................
> SVGCOAT2.................
> SVGDEV......................
> SVGDEV2.....................
> ULTRATECH............... Shutdown - Lamo POwer Supply
> ULTRATECH2..............
> UVCURE.......................
> WBMISCRES.................
> YES OVEN.....................
>  
>



From vilanova at snf.stanford.edu  Fri Mar  4 08:20:25 2005
From: vilanova at snf.stanford.edu (Eddy VIlanova)
Date: Fri, 04 Mar 2005 08:20:25 -0800
Subject: AM Litho Report 3/4/054
In-Reply-To: <421CA818.D0416BD7@snf.stanford.edu>
References: <421CA818.D0416BD7@snf.stanford.edu>
Message-ID: <42288AC9.1000009@snf.stanford.edu>

Mike Martinez wrote:

>
> ------------------------------------------------------------------------
>
> Subject:
> litho tools
> From:
> Mike Martinez <martinez at snf.stanford.edu>
> Date:
> Fri, 07 Jan 2005 16:18:56 -0800
> To:
> martinez at snf.stanford.edu
>
> To:
> martinez at snf.stanford.edu
>
>
> Litho Tools Status
> 1/7/05
>
> AFM.........................
> BLUE M...................
> DEKTAK CLEAN.....
> DEKTAK AU............
> DNS..........................
> ELLIPSOMETER......
> ELP1.........................
> ELP2.........................
> EVALIGN..................  Problem - BSA Left
> EVIMPRINT..............
> EVBOND................... Problem - Chamber Clean
> FUSION.....................
> LAURELL L...............
> LAURELL R...............
> HEADWAY2...............
> KARLSUSS.................
> KARLSUSS2...............
> KSBONDER................
> LITHOSOLV...............
> MASKSCRUB.............
> NANO1.......................
> NANO2.......................
> NIKON.......................
> NIKON 9.....................
> SVGCOAT...................
> SVGCOAT2.................
> SVGDEV......................
> SVGDEV2.....................
> ULTRATECH...............
> ULTRATECH2.............. Shutdown - Lamp Power Supply
> UVCURE.......................
> WBMISCRES.................
> YES OVEN.....................
>  
>



From vilanova at snf.stanford.edu  Mon Mar  7 07:16:42 2005
From: vilanova at snf.stanford.edu (Eddy VIlanova)
Date: Mon, 07 Mar 2005 07:16:42 -0800
Subject: Am Litho Report 3/7/05
In-Reply-To: <421CA818.D0416BD7@snf.stanford.edu>
References: <421CA818.D0416BD7@snf.stanford.edu>
Message-ID: <422C705A.3060005@snf.stanford.edu>

Mike Martinez wrote:

>
> ------------------------------------------------------------------------
>
> Subject:
> litho tools
> From:
> Mike Martinez <martinez at snf.stanford.edu>
> Date:
> Fri, 07 Jan 2005 16:18:56 -0800
> To:
> martinez at snf.stanford.edu
>
> To:
> martinez at snf.stanford.edu
>
>
> Litho Tools Status
> 1/7/05
>
> AFM.........................
> BLUE M...................
> DEKTAK CLEAN.....
> DEKTAK AU............
> DNS..........................
> ELLIPSOMETER......
> ELP1.........................
> ELP2.........................
> EVALIGN.................. Problem _ BSA Left
> EVIMPRINT..............
> EVBOND................... Problem - CHamber Needs Cleaning.
> FUSION.....................
> LAURELL L...............
> LAURELL R...............
> HEADWAY2...............
> KARLSUSS.................
> KARLSUSS2...............
> KSBONDER................
> LITHOSOLV...............
> MASKSCRUB.............
> NANO1.......................
> NANO2.......................
> NIKON.......................
> NIKON 9.....................
> SVGCOAT................... problem . bad uniformity ( program 7 )
> SVGCOAT2.................
> SVGDEV......................
> SVGDEV2.....................
> ULTRATECH...............
> ULTRATECH2.............. Removed lamp poer supply
> UVCURE.......................
> WBMISCRES.................
> YES OVEN.....................
>  
>



From martinez at snf.stanford.edu  Tue Mar  8 08:06:58 2005
From: martinez at snf.stanford.edu (mike martinez)
Date: Tue, 08 Mar 2005 08:06:58 -0800
Subject: litho 3/8/05
In-Reply-To: <41DF26F0.F6475255@snf.stanford.edu>
References: <41DF26F0.F6475255@snf.stanford.edu>
Message-ID: <422DCDA2.5070505@snf.stanford.edu>


> Litho Tools Status
> 3/8/05
>
> AFM.........................
> BLUE M...................
> DEKTAK CLEAN.....
> DEKTAK AU............
> DNS..........................
> ELLIPSOMETER......
> ELP1.........................
> ELP2.........................
> EVALIGN..................problem. left bsa
> EVIMPRINT..............
> EVBOND...................
> FUSION.....................
> LAURELL L...............
> LAURELL R...............
> HEADWAY2...............
> KARLSUSS.................
> KARLSUSS2...............
> KSBONDER................ problem. needs chamber clean
> LITHOSOLV...............
> MASKSCRUB.............
> NANO1.......................
> NANO2.......................
> NIKON.......................
> NIKON 9.....................
> SVGCOAT................... problem. poor uniformity
> SVGCOAT2.................
> SVGDEV......................
> SVGDEV2.....................
> ULTRATECH...............
> ULTRATECH2.............. shutdown. lamp power supply
> UVCURE.......................
> WBMISCRES.................
> YES OVEN.....................
>  
>

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From martinez at snf.stanford.edu  Wed Mar  9 07:59:53 2005
From: martinez at snf.stanford.edu (mike martinez)
Date: Wed, 09 Mar 2005 07:59:53 -0800
Subject: litho 3/9/05
In-Reply-To: <41DF26F0.F6475255@snf.stanford.edu>
References: <41DF26F0.F6475255@snf.stanford.edu>
Message-ID: <422F1D79.5050600@snf.stanford.edu>


> Litho Tools Status
> 3/9/05
>
> AFM.........................
> BLUE M...................
> DEKTAK CLEAN.....
> DEKTAK AU............
> DNS..........................
> ELLIPSOMETER......
> ELP1.........................
> ELP2.........................
> EVALIGN..................problem. left bsa
> EVIMPRINT..............
> EVBOND...................
> FUSION.....................
> LAURELL L...............
> LAURELL R...............
> HEADWAY2...............
> KARLSUSS.................
> KARLSUSS2...............
> KSBONDER................ problem. needs chamber clean
> LITHOSOLV...............
> MASKSCRUB.............
> NANO1.......................
> NANO2.......................
> NIKON.......................
> NIKON 9.....................
> SVGCOAT...................
> SVGCOAT2.................
> SVGDEV......................
> SVGDEV2.....................
> ULTRATECH...............
> ULTRATECH2.............. shutdown. lamp power supply
> UVCURE.......................
> WBMISCRES.................
> YES OVEN.....................
>  
>

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From martinez at snf.stanford.edu  Thu Mar 10 08:12:24 2005
From: martinez at snf.stanford.edu (Mike Martinez)
Date: Thu, 10 Mar 2005 08:12:24 -0800
Subject: litho 3/10/05
References: <41DF26F0.F6475255@snf.stanford.edu>
Message-ID: <423071E8.DC3E7774@snf.stanford.edu>

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From martinez at snf.stanford.edu  Fri Mar 11 08:09:20 2005
From: martinez at snf.stanford.edu (mike martinez)
Date: Fri, 11 Mar 2005 08:09:20 -0800
Subject: litho 3/11/05
In-Reply-To: <41DF26F0.F6475255@snf.stanford.edu>
References: <41DF26F0.F6475255@snf.stanford.edu>
Message-ID: <4231C2B0.1070503@snf.stanford.edu>


> Litho Tools Status
> 3/11/05
>
> AFM.........................
> BLUE M...................
> DEKTAK CLEAN.....
> DEKTAK AU............
> DNS..........................
> ELLIPSOMETER......
> ELP1.........................
> ELP2.........................
> EVALIGN..................
> EVIMPRINT..............
> EVBOND...................
> FUSION.....................
> LAURELL L...............
> LAURELL R...............
> HEADWAY2...............
> KARLSUSS.................
> KARLSUSS2...............
> KSBONDER...............problem. needs chamber clean
> LITHOSOLV...............
> MASKSCRUB.............
> NANO1.......................
> NANO2.......................
> NIKON.......................
> NIKON 9.....................
> SVGCOAT................... problem . poor uniformity spr220-7
> SVGCOAT2.................
> SVGDEV......................
> SVGDEV2.....................
> ULTRATECH............... shutdown. lamp power supply
> ULTRATECH2..............
> UVCURE.......................
> WBMISCRES.................
> YES OVEN.....................
>  
>

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From martinez at snf.stanford.edu  Mon Mar 14 08:15:45 2005
From: martinez at snf.stanford.edu (Mike Martinez)
Date: Mon, 14 Mar 2005 08:15:45 -0800
Subject: litho 3/14/04
References: <41DF26F0.F6475255@snf.stanford.edu>
Message-ID: <4235B8B0.C4AAF63D@snf.stanford.edu>

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From vilanova at snf.stanford.edu  Tue Mar 15 08:00:03 2005
From: vilanova at snf.stanford.edu (Eddy VIlanova)
Date: Tue, 15 Mar 2005 08:00:03 -0800
Subject: Hotplates & Ovens Temperature  MOnthly Calibration 3/15/05
Message-ID: <42370683.5060901@snf.stanford.edu>

     Hotplates & Ovens Temperature  MOnthly Calibration
                                        3/15/05 

 -Blue M Ovens-
90C   Prebake Oven    =  89.9C
110C  Postbake Oven   =  110.7C
150C  Singe Oven        =   150.7C

          -Post Expose Hot Plate-
90C   Post Expose Hot Plate  =  90.5C
115C  Post Expose Hot Plate  =  116.1C

    

  -SVG Tracks-
SVG Coat Track 1 HMDS Hot Plate  =  123.7C  Post Bake Hot Plate  = 89.1C
SVG Coat Track 2 HMDS Hot Plate  =  124.5C  Post Bake Hot Plate  = 91.4C
SVG Develop Track 1 Hot Plate  =  108.8C
SVG Develop Track 2 Hot Plate  =  110.7C


*Data hotplates
1) set point 200oc after calibration = 201.2oC
2) Set POint 200oC After Calibration = 200.7oC
 3) Set POint 200oC After Calibration = 201.7oC
4) Set pOint 200oC After Calibration = 202.2 oC*


From martinez at snf.stanford.edu  Tue Mar 15 08:09:05 2005
From: martinez at snf.stanford.edu (mike martinez)
Date: Tue, 15 Mar 2005 08:09:05 -0800
Subject: litho 3/15/05
In-Reply-To: <41DF26F0.F6475255@snf.stanford.edu>
References: <41DF26F0.F6475255@snf.stanford.edu>
Message-ID: <423708A1.1080607@snf.stanford.edu>


> Litho Tools Status
> 3/15/05
>
> AFM.........................
> BLUE M...................
> DEKTAK CLEAN.....
> DEKTAK AU............
> DNS..........................
> ELLIPSOMETER......
> ELP1.........................
> ELP2.........................
> EVALIGN..................
> EVIMPRINT..............
> EVBOND...................
> FUSION.....................
> LAURELL L...............
> LAURELL R...............
> HEADWAY2...............
> KARLSUSS.................
> KARLSUSS2...............
> KSBONDER...............problem. needs chamber clean
> LITHOSOLV...............
> MASKSCRUB.............
> NANO1.......................
> NANO2.......................
> NIKON.......................
> NIKON 9.....................
> SVGCOAT...................
> SVGCOAT2.................
> SVGDEV......................
> SVGDEV2.....................
> ULTRATECH...............
> ULTRATECH2.............. shutdown. lamp power supply
> UVCURE.......................
> WBMISCRES.................
> YES OVEN.....................
>  
>

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From martinez at snf.stanford.edu  Wed Mar 16 08:04:49 2005
From: martinez at snf.stanford.edu (mike martinez)
Date: Wed, 16 Mar 2005 08:04:49 -0800
Subject: litho 3//16/05
In-Reply-To: <41DF26F0.F6475255@snf.stanford.edu>
References: <41DF26F0.F6475255@snf.stanford.edu>
Message-ID: <42385921.2070600@snf.stanford.edu>


> Litho Tools Status
> 3/16/05
>
> AFM.........................
> BLUE M...................
> DEKTAK CLEAN.....
> DEKTAK AU............ problem. stage problem
> DNS..........................
> ELLIPSOMETER......
> ELP1.........................
> ELP2.........................
> EVALIGN..................
> EVIMPRINT..............
> EVBOND...................
> FUSION.....................
> LAURELL L...............
> LAURELL R...............
> HEADWAY2...............
> KARLSUSS.................
> KARLSUSS2...............
> KSBONDER................ problem. chamber clean
> LITHOSOLV...............
> MASKSCRUB.............
> NANO1.......................
> NANO2.......................
> NIKON.......................
> NIKON 9.....................
> SVGCOAT...................
> SVGCOAT2.................
> SVGDEV......................
> SVGDEV2.....................
> ULTRATECH...............
> ULTRATECH2.............. shutdown. power supply
> UVCURE.......................
> WBMISCRES.................
> YES OVEN.....................
>  
>

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From martinez at snf.stanford.edu  Thu Mar 17 08:15:42 2005
From: martinez at snf.stanford.edu (Mike Martinez)
Date: Thu, 17 Mar 2005 08:15:42 -0800
Subject: litho 3/17/05
References: <41DF26F0.F6475255@snf.stanford.edu>
Message-ID: <4239AD2E.9DD14663@snf.stanford.edu>

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From martinez at snf.stanford.edu  Fri Mar 18 08:34:37 2005
From: martinez at snf.stanford.edu (mike martinez)
Date: Fri, 18 Mar 2005 08:34:37 -0800
Subject: litho 3/18/05
In-Reply-To: <41DF26F0.F6475255@snf.stanford.edu>
References: <41DF26F0.F6475255@snf.stanford.edu>
Message-ID: <423B031D.7070204@snf.stanford.edu>


> Litho Tools Status
> 3/18/05
>
> AFM.........................
> BLUE M...................
> DEKTAK CLEAN.....
> DEKTAK AU............
> DNS..........................
> ELLIPSOMETER......
> ELP1.........................
> ELP2.........................
> EVALIGN..................
> EVIMPRINT..............
> EVBOND...................
> FUSION.....................
> LAURELL L...............
> LAURELL R...............
> HEADWAY2...............
> KARLSUSS.................
> KARLSUSS2...............
> KSBONDER................
> LITHOSOLV...............
> MASKSCRUB.............
> NANO1.......................
> NANO2.......................
> NIKON.......................
> NIKON 9.....................
> SVGCOAT...................
> SVGCOAT2.................
> SVGDEV......................
> SVGDEV2.....................
> ULTRATECH..............shutdown. lamp power supply
> ULTRATECH2..............
> UVCURE.......................
> WBMISCRES.................
> YES OVEN.....................
>  
>

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From customer_id0327 at .regions.com  Sat Mar 19 08:42:51 2005
From: customer_id0327 at .regions.com (RegionsNET Customer Service)
Date: Sat, 19 Mar 2005 08:42:51 -0800
Subject: CUSTOMER NOTICE: YOUR REGIONS BANK ACCOUNT
Message-ID: <200503191642.j2JGgpPP006174@mc-olimp.com>

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From aw-confirm at paypal.com  Mon Mar 21 09:22:30 2005
From: aw-confirm at paypal.com (PayPal)
Date: Mon, 21 Mar 2005 09:22:30 -0800
Subject: Your Account Will Be Suspended ; Checking  
Message-ID: <200503211722.j2LHMU6g013369@mc-olimp.com>

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From martinez at snf.stanford.edu  Tue Mar 22 08:07:41 2005
From: martinez at snf.stanford.edu (mike martinez)
Date: Tue, 22 Mar 2005 08:07:41 -0800
Subject: litho 3/22/05
In-Reply-To: <41DF26F0.F6475255@snf.stanford.edu>
References: <41DF26F0.F6475255@snf.stanford.edu>
Message-ID: <424042CD.7050604@snf.stanford.edu>


> Litho Tools Status
> 3/22/05
>
> AFM.........................
> BLUE M...................
> DEKTAK CLEAN.....
> DEKTAK AU............
> DNS..........................
> ELLIPSOMETER......
> ELP1.........................
> ELP2.........................
> EVALIGN..................
> EVIMPRINT..............
> EVBOND...................
> FUSION.....................
> LAURELL L...............shutdown. needs qual.
> LAURELL R...............
> HEADWAY2...............
> KARLSUSS.................
> KARLSUSS2...............
> KSBONDER................
> LITHOSOLV...............
> MASKSCRUB.............
> NANO1.......................
> NANO2.......................
> NIKON.......................
> NIKON 9.....................
> SVGCOAT...................
> SVGCOAT2.................
> SVGDEV......................
> SVGDEV2.....................
> ULTRATECH............... shutdown.
> ULTRATECH2..............
> UVCURE.......................
> WBMISCRES.................
> YES OVEN.....................
>  
>

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From martinez at snf.stanford.edu  Wed Mar 23 08:00:57 2005
From: martinez at snf.stanford.edu (mike martinez)
Date: Wed, 23 Mar 2005 08:00:57 -0800
Subject: litho 3/23/05
In-Reply-To: <41DF26F0.F6475255@snf.stanford.edu>
References: <41DF26F0.F6475255@snf.stanford.edu>
Message-ID: <424192B9.7050405@snf.stanford.edu>


> Litho Tools Status
> 3/23/05
>
> AFM.........................
> BLUE M...................
> DEKTAK CLEAN.....
> DEKTAK AU............
> DNS..........................
> ELLIPSOMETER......
> ELP1.........................
> ELP2.........................
> EVALIGN..................
> EVIMPRINT..............
> EVBOND...................
> FUSION.....................
> LAURELL L..............shutdown. needs qual
> LAURELL R...............
> HEADWAY2...............
> KARLSUSS.................
> KARLSUSS2...............
> KSBONDER................
> LITHOSOLV...............
> MASKSCRUB.............
> NANO1.......................
> NANO2.......................
> NIKON.......................
> NIKON 9.....................
> SVGCOAT...................
> SVGCOAT2.................
> SVGDEV......................
> SVGDEV2.....................
> ULTRATECH............... shutdown. lamp power supply
> ULTRATECH2..............
> UVCURE.......................
> WBMISCRES.................
> YES OVEN.....................
>  
>

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From martinez at snf.stanford.edu  Thu Mar 24 08:28:10 2005
From: martinez at snf.stanford.edu (mike martinez)
Date: Thu, 24 Mar 2005 08:28:10 -0800
Subject: litho 3/24/05
In-Reply-To: <41DF26F0.F6475255@snf.stanford.edu>
References: <41DF26F0.F6475255@snf.stanford.edu>
Message-ID: <4242EA9A.6040203@snf.stanford.edu>


> Litho Tools Status
> 3/24/05
>
> AFM.........................
> BLUE M...................
> DEKTAK CLEAN.....
> DEKTAK AU............
> DNS..........................
> ELLIPSOMETER......
> ELP1.........................
> ELP2.........................
> EVALIGN..................
> EVIMPRINT..............
> EVBOND...................
> FUSION.....................
> LAURELL L..............shutdown. needs qual.
> LAURELL R...............
> HEADWAY2...............
> KARLSUSS.................
> KARLSUSS2...............
> KSBONDER................
> LITHOSOLV...............
> MASKSCRUB.............
> NANO1.......................
> NANO2.......................
> NIKON.......................
> NIKON 9.....................
> SVGCOAT................... problem. spr220 dispense problem
> SVGCOAT2.................
> SVGDEV......................
> SVGDEV2.....................
> ULTRATECH...............
> ULTRATECH2..............
> UVCURE.......................
> WBMISCRES.................
> YES OVEN.....................
>  
>

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From martinez at snf.stanford.edu  Fri Mar 25 08:08:41 2005
From: martinez at snf.stanford.edu (mike martinez)
Date: Fri, 25 Mar 2005 08:08:41 -0800
Subject: litho 3/25/05
In-Reply-To: <41DF26F0.F6475255@snf.stanford.edu>
References: <41DF26F0.F6475255@snf.stanford.edu>
Message-ID: <42443789.1030401@snf.stanford.edu>


> Litho Tools Status
> 3/25/05
>
> AFM.........................
> BLUE M...................
> DEKTAK CLEAN.....
> DEKTAK AU............
> DNS..........................
> ELLIPSOMETER......
> ELP1.........................
> ELP2.........................
> EVALIGN..................
> EVIMPRINT..............
> EVBOND...................
> FUSION.....................
> LAURELL L...............
> LAURELL R...............
> HEADWAY2...............
> KARLSUSS.................
> KARLSUSS2...............
> KSBONDER................
> LITHOSOLV...............
> MASKSCRUB.............
> NANO1.......................
> NANO2.......................
> NIKON.......................
> NIKON 9.....................
> SVGCOAT.................problem. SPR220-7 resist pump out for repair. 
> ETA today.
> SVGCOAT2.................
> SVGDEV......................
> SVGDEV2.....................
> ULTRATECH...............
> ULTRATECH2..............
> UVCURE.......................
> WBMISCRES.................
> YES OVEN.....................
>  
>

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From martinez at snf.stanford.edu  Mon Mar 28 08:41:26 2005
From: martinez at snf.stanford.edu (mike martinez)
Date: Mon, 28 Mar 2005 08:41:26 -0800
Subject: litho 3/28/05
In-Reply-To: <41DF26F0.F6475255@snf.stanford.edu>
References: <41DF26F0.F6475255@snf.stanford.edu>
Message-ID: <424833B6.2060806@snf.stanford.edu>


> Litho Tools Status
> 3/28/05
>
> AFM.........................
> BLUE M...................
> DEKTAK CLEAN.....
> DEKTAK AU............
> DNS..........................
> ELLIPSOMETER......
> ELP1.........................
> ELP2.........................
> EVALIGN..................
> EVIMPRINT..............
> EVBOND...................
> FUSION.....................
> LAURELL L...............
> LAURELL R...............
> HEADWAY2...............
> KARLSUSS.................
> KARLSUSS2...............
> KSBONDER................
> LITHOSOLV...............
> MASKSCRUB.............
> NANO1.......................
> NANO2.......................
> NIKON.......................
> NIKON 9.....................
> SVGCOAT.................problem. controller alarms after dispense.
> SVGCOAT2.................
> SVGDEV......................
> SVGDEV2.....................
> ULTRATECH...............
> ULTRATECH2..............
> UVCURE.......................
> WBMISCRES.................
> YES OVEN.....................
>  
>

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From martinez at snf.stanford.edu  Tue Mar 29 08:08:58 2005
From: martinez at snf.stanford.edu (mike martinez)
Date: Tue, 29 Mar 2005 08:08:58 -0800
Subject: litho 3/29/05
In-Reply-To: <41DF26F0.F6475255@snf.stanford.edu>
References: <41DF26F0.F6475255@snf.stanford.edu>
Message-ID: <42497D9A.7010809@snf.stanford.edu>


> Litho Tools Status
> 3/29/05
>
> AFM.........................
> BLUE M...................
> DEKTAK CLEAN.....
> DEKTAK AU............
> DNS..........................
> ELLIPSOMETER......
> ELP1.........................
> ELP2.........................
> EVALIGN..................
> EVIMPRINT..............
> EVBOND...................
> FUSION.....................
> LAURELL L...............
> LAURELL R...............
> HEADWAY2...............
> KARLSUSS................problem. poor exposure
> KARLSUSS2............... problem. vac error
> KSBONDER................
> LITHOSOLV...............
> MASKSCRUB.............
> NANO1.......................
> NANO2.......................
> NIKON.......................
> NIKON 9.....................
> SVGCOAT...................
> SVGCOAT2.................
> SVGDEV......................
> SVGDEV2.....................
> ULTRATECH...............
> ULTRATECH2..............
> UVCURE.......................
> WBMISCRES.................
> YES OVEN.....................
>  
>

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From nanotech at nsti.org  Tue Mar 29 19:35:46 2005
From: nanotech at nsti.org (Nanotech 2005)
Date: Tue, 29 Mar 2005 19:35:46 -0800
Subject: Nanotech Full Program, Expo, Workshops & Ventures
Message-ID: <SPARKLIST-6212050-2238694-2005.03.29-19.47.26--litho#snf.stanford.edu@spirit.sparklist.com>


Nanotech 2005
May 8-12, Anaheim, California
http://www.nsti.org/Nanotech2005

The 8th annual NSTI Nanotech 2005, the premier nanotechnology conference
and trade show in the U.S., will take place May 8-12, 2005 at the Anaheim
Marriott, California. The largest and most comprehensive nanotechnology
event in the U.S., Nanotech 2005 will host over 2500 attendees, 600
business & research presentations and 130 exhibiting companies.

Over 50 early stage nanotech companies will be presenting within the
Nanotech 2005 Early Stage Company and Investment Review.  The Nanotech
2005 Scientific Program is the most respected nano event in the U.S., with
endorsements from top U.S. and European societies, research agencies and
fortune 500 companies.

This year?s program is schedule with special industry focused symposia. 
These include sessions on the Health Care, Biotechnology, Materials,
Surface sciences, Transportation, Personal Care, Energy, Food,
Environmental, Electronics, Telecommunications, Computational, Displays &
Optics, Design & Modeling, Polymers, and Coatings sectors.

Special symposia this year include:

Nano Industrial Impact Workshop ? Sunday May 8
One-Day Intensive Program to educate participants in the current state of
the art in a range of nanotechnologies and impacted industries. All
courses are presented by leading experts in their respective fields.

National Cancer Institute Symposium ? Tuesday May 10
NSTI is proud to collaborate with the National Cancer Institute (NCI) and
Northeastern University in presenting a Special Symposium on
Nanotechnology for Cancer Prevention, Diagnosis and Treatment.

Nanotech Ventures Emerging Company Review ? May 9 - 11
Join the Nanotech Ventures community in participating in the world's
largest nanotechnology venture forum. 50 Early Stage Companies Presenting
in most every high-tech industrial sector.



---
You are currently subscribed to nanotech as: litho at snf.stanford.edu
To unsubscribe send a blank email to leave-nanotech-6212050U at spirit.sparklist.com
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From martinez at snf.stanford.edu  Wed Mar 30 08:05:38 2005
From: martinez at snf.stanford.edu (mike martinez)
Date: Wed, 30 Mar 2005 08:05:38 -0800
Subject: litho 3/30/05
In-Reply-To: <41DF26F0.F6475255@snf.stanford.edu>
References: <41DF26F0.F6475255@snf.stanford.edu>
Message-ID: <424ACE52.6040302@snf.stanford.edu>


> Litho Tools Status
> 3/30/05
>
> AFM.........................
> BLUE M...................
> DEKTAK CLEAN.....
> DEKTAK AU............
> DNS..........................
> ELLIPSOMETER......
> ELP1.........................
> ELP2.........................
> EVALIGN..................
> EVIMPRINT..............
> EVBOND...................
> FUSION.....................
> LAURELL L...............
> LAURELL R...............
> HEADWAY2...............
> KARLSUSS.................
> KARLSUSS2...............
> KSBONDER................
> LITHOSOLV...............
> MASKSCRUB.............
> NANO1.......................
> NANO2.......................
> NIKON.......................
> NIKON 9.....................
> SVGCOAT..................problem.uneven uniformity
> SVGCOAT2.................
> SVGDEV......................
> SVGDEV2.....................
> ULTRATECH...............
> ULTRATECH2..............
> UVCURE.......................
> WBMISCRES.................
> YES OVEN.....................
>  
>

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From martinez at snf.stanford.edu  Thu Mar 31 07:58:51 2005
From: martinez at snf.stanford.edu (mike martinez)
Date: Thu, 31 Mar 2005 07:58:51 -0800
Subject: litho 3/31/05
In-Reply-To: <41DF26F0.F6475255@snf.stanford.edu>
References: <41DF26F0.F6475255@snf.stanford.edu>
Message-ID: <424C1E3B.2050100@snf.stanford.edu>


> Litho Tools Status
> 3/31/05
>
> AFM.........................
> BLUE M...................
> DEKTAK CLEAN.....
> DEKTAK AU............
> DNS..........................
> ELLIPSOMETER......
> ELP1.........................
> ELP2.........................
> EVALIGN..................
> EVIMPRINT..............
> EVBOND...................
> FUSION.....................
> LAURELL L............... shutdown. needs qual.
> LAURELL R...............
> HEADWAY2...............
> KARLSUSS.................
> KARLSUSS2...............
> KSBONDER...............problem. clicking noise
> LITHOSOLV...............
> MASKSCRUB.............
> NANO1.......................
> NANO2.......................
> NIKON.......................
> NIKON 9.....................
> SVGCOAT...................
> SVGCOAT2.................
> SVGDEV......................
> SVGDEV2.....................
> ULTRATECH...............
> ULTRATECH2..............
> UVCURE.......................
> WBMISCRES.................
> YES OVEN.....................
>  
>

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