Litho AM Report 3/3/05

Eddy VIlanova vilanova at snf.stanford.edu
Thu Mar 3 07:23:47 PST 2005


:

>
> ------------------------------------------------------------------------
>
> Litho Tools Status
> 3/3/05
>
> AFM.........................
> BLUE M...................
> DEKTAK CLEAN.....
> DEKTAK AU............
> DNS..........................
> ELLIPSOMETER......
> ELP1.........................
> ELP2.........................
> EVALIGN.................. Problem - BSA left
> EVIMPRINT..............
> EVBOND................... Problem Chamber Clean
> FUSION.....................
> LAURELL L...............
> LAURELL R...............
> HEADWAY2...............
> KARLSUSS.................
> KARLSUSS2...............
> KSBONDER................
> LITHOSOLV...............
> MASKSCRUB.............
> NANO1.......................
> NANO2.......................
> NIKON.......................
> NIKON 9.....................
> SVGCOAT...................
> SVGCOAT2.................
> SVGDEV......................
> SVGDEV2.....................
> ULTRATECH............... Shutdown - Lamo POwer Supply
> ULTRATECH2..............
> UVCURE.......................
> WBMISCRES.................
> YES OVEN.....................
>  
>




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