Am Litho Report 3/7/05

Eddy VIlanova vilanova at snf.stanford.edu
Mon Mar 7 07:16:42 PST 2005


Mike Martinez wrote:

>
> ------------------------------------------------------------------------
>
> Subject:
> litho tools
> From:
> Mike Martinez <martinez at snf.stanford.edu>
> Date:
> Fri, 07 Jan 2005 16:18:56 -0800
> To:
> martinez at snf.stanford.edu
>
> To:
> martinez at snf.stanford.edu
>
>
> Litho Tools Status
> 1/7/05
>
> AFM.........................
> BLUE M...................
> DEKTAK CLEAN.....
> DEKTAK AU............
> DNS..........................
> ELLIPSOMETER......
> ELP1.........................
> ELP2.........................
> EVALIGN.................. Problem _ BSA Left
> EVIMPRINT..............
> EVBOND................... Problem - CHamber Needs Cleaning.
> FUSION.....................
> LAURELL L...............
> LAURELL R...............
> HEADWAY2...............
> KARLSUSS.................
> KARLSUSS2...............
> KSBONDER................
> LITHOSOLV...............
> MASKSCRUB.............
> NANO1.......................
> NANO2.......................
> NIKON.......................
> NIKON 9.....................
> SVGCOAT................... problem . bad uniformity ( program 7 )
> SVGCOAT2.................
> SVGDEV......................
> SVGDEV2.....................
> ULTRATECH...............
> ULTRATECH2.............. Removed lamp poer supply
> UVCURE.......................
> WBMISCRES.................
> YES OVEN.....................
>  
>




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