Hotplates & Ovens Temperature MOnthly Calibration 3/15/05

Eddy VIlanova vilanova at snf.stanford.edu
Tue Mar 15 08:00:03 PST 2005


     Hotplates & Ovens Temperature  MOnthly Calibration
                                        3/15/05 

 -Blue M Ovens-
90C   Prebake Oven    =  89.9C
110C  Postbake Oven   =  110.7C
150C  Singe Oven        =   150.7C

          -Post Expose Hot Plate-
90C   Post Expose Hot Plate  =  90.5C
115C  Post Expose Hot Plate  =  116.1C

    

  -SVG Tracks-
SVG Coat Track 1 HMDS Hot Plate  =  123.7C  Post Bake Hot Plate  = 89.1C
SVG Coat Track 2 HMDS Hot Plate  =  124.5C  Post Bake Hot Plate  = 91.4C
SVG Develop Track 1 Hot Plate  =  108.8C
SVG Develop Track 2 Hot Plate  =  110.7C


*Data hotplates
1) set point 200oc after calibration = 201.2oC
2) Set POint 200oC After Calibration = 200.7oC
 3) Set POint 200oC After Calibration = 201.7oC
4) Set pOint 200oC After Calibration = 202.2 oC*



More information about the litho mailing list