resist thickness 5/16/05

mike martinez martinez at snf.stanford.edu
Mon May 16 15:35:51 PDT 2005


svgcoat            T            C            B            L            R
1.0um         10250      10226      10251   10276      10277
1.6um         16832      16812      16853   16866      16837
7.0um         71676      71365      71652   71869      71813

svgcoat2     
1.0um         10084      10020      9993      10063      10057
1.6um         16500      16491      16569     16553      16532
3.0um         29371      29264      29370      29360      29531




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