AM LITHO DAILY REPORT 5/27/05

Eddy VIlanova Vilanova at snf.stanford.edu
Fri May 27 08:43:47 PDT 2005


Litho Tools Status
5/27/05

AFM.........................
BLUE M...................
DEKTAK 
CLEAN.....                                                           
DEKTAK AU............
DNS..........................
ELLIPSOMETER......
ELP1.........................
ELP2.........................
EVALIGN..................
EVIMPRINT..............
EVBOND...................
FUSION.....................
LAURELL L...............
LAURELL R...............
HEADWAY2...............
KARLSUSS.................
KARLSUSS2...............
KSBONDER................
LITHOSOLV...............
MASKSCRUB.............
NANO1.......................
NANO2.......................
NIKON.......................
NIKON 9.....................
SVGCOAT...................
SVGCOAT2.................
SVGDEV......................
SVGDEV2.....................
ULTRATECH...............
ULTRATECH2..............
UVCURE.......................
WBMISCRES.................
YES OVEN.....................





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