Litho AM Report 11/07/05

Eddy VIlanova Vilanova at snf.stanford.edu
Mon Nov 7 07:27:39 PST 2005


* Litho Tools Status >
11/07/05
 > > AFM......................... >
BLUE M................... >
DEKTAK CLEAN..... >
 DEKTAK AU............ >
 DNS.......................... >
 ELLIPSOMETER...... >
ELP1......................... >
 ELP2......................... >
 EVALIGN.................. Problem - Poor Resolution on 5um or Less. >
 EVIMPRINT.............. >
 EVBOND................... >
 FUSION..................... >
 LAURELL L............... >
 LAURELL R............... >
 HEADWAY2............... >
KARLSUSS................. >
KARLSUSS2............... >
 KSBONDER................ >
 LITHOSOLV............... >
 MASKSCRUB............. >
 NANO1....................... >
 NANO2....................... >
NIKON......................shutdown for water leaking from ceiling. >
 NIKON 9..................... >
 SVGCOAT................... >
 SVGCOAT2................. >
 SVGDEV...................... >
 SVGDEV2..................... >
 ULTRATECH............... >
 ULTRATECH2.............. >
UVCURE....................... >
 WBMISCRES................. >
YES OVEN..................... >*




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