AM Daily Report 11/08/05

Eddy VIlanova Vilanova at snf.stanford.edu
Tue Nov 8 07:10:06 PST 2005


* Litho Tools Status 
	11/08/05
AFM....................
BLUE M.................
DEKTAK CLEAN...........
DEKTAK AU..............
DNS....................
ELLIPSOMETER...........
ELP1...................
ELP2...................
EVALIGN................ Problem - Poor Resolution on 5um or Less.
EVIMPRINT..............
EVBOND.................
FUSION.................
LAURELL L..............
LAURELL R..............
HEADWAY2...............
KARLSUSS...............
KARLSUSS2..............
KSBONDER...............
LITHOSOLV..............
MASKSCRUB..............
NANO1.................. Shutdown - Bad Power Supply.
NANO2..................
NIKON.................. Problem -  System Temperature not reaching the Set point.  
NIKON 9................
SVGCOAT................
SVGCOAT2...............
SVGDEV.................
SVGDEV2................
ULTRATECH..............
ULTRATECH2.............
UVCURE.................
WBMISCRES..............
YES OVEN...............
*





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