AM Daily Report 11/09/05

Eddy VIlanova Vilanova at snf.stanford.edu
Wed Nov 9 07:01:39 PST 2005


Litho Tools Status
11/09/05

AFM.........................
BLUE M...................
DEKTAK CLEAN.....
DEKTAK AU............
DNS..........................
ELLIPSOMETER......
ELP1.........................
ELP2.........................
EVALIGN..................  Problem - Poor Resolution On 5 um Or Less.
EVIMPRINT..............
EVBOND...................
FUSION.....................
LAURELL L...............
LAURELL R...............
HEADWAY2...............
KARLSUSS.................
KARLSUSS2...............
KSBONDER................
LITHOSOLV...............
MASKSCRUB.............
NANO1.......................
NANO2.......................
NIKON......................shutdown - Cooling System Down .  
NIKON 9.....................
SVGCOAT...................
SVGCOAT2.................
SVGDEV......................
SVGDEV2.....................
ULTRATECH...............
ULTRATECH2..............
UVCURE.......................
WBMISCRES.................
YES OVEN.....................





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