Litho AM Daily Report 11/16/05

Eddy VIlanova Vilanova at snf.stanford.edu
Wed Nov 16 06:51:03 PST 2005


*Litho Tools Status*

*11/16/05*

* *

*AFM.........................*

*BLUE M...................*

*DEKTAK CLEAN.........*

*DEKTAK AU............*

*DNS..........................*

*ELLIPSOMETER......*

*ELP1.........................*

*ELP2.........................*

*EVALIGN..................*

*EVIMPRINT..............*

*EVBOND...................*

*FUSION.....................*

*LAURELL L...............*

*LAURELL R...............*

*HEADWAY2...............*

*KARLSUSS.................*

*KARLSUSS2...............*

*KSBONDER................*

*LITHOSOLV...............*

*MASKSCRUB.............*

*NANO1.......................*

*NANO2.......................*

*NIKON......................problem theta drift.*

*NIKON 9.....................*

*SVGCOAT...................*

*SVGCOAT2.................*

*SVGDEV......................*

*SVGDEV2.....................*

*ULTRATECH...............*

*ULTRATECH2..............*

*UVCURE.......................*

*WBMISCRES.................*

*YES OVEN.....................*





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