From martinez at snf.stanford.edu Mon Oct 3 08:03:59 2005 From: martinez at snf.stanford.edu (mike martinez) Date: Mon, 03 Oct 2005 08:03:59 -0700 Subject: litho 10/3/05 In-Reply-To: <41DF26F0.F6475255@snf.stanford.edu> References: <41DF26F0.F6475255@snf.stanford.edu> Message-ID: <4341485F.3@snf.stanford.edu> > Litho Tools Status > 10/3/05 > > AFM......................... > BLUE M................... > DEKTAK CLEAN..... > DEKTAK AU............ > DNS.......................... > ELLIPSOMETER...... > ELP1......................... > ELP2......................... > EVALIGN.................. > EVIMPRINT.............. > EVBOND...................problem. possible bad turbo pump > FUSION..................... > LAURELL L............... > LAURELL R............... > HEADWAY2............... > KARLSUSS................. > KARLSUSS2............... > KSBONDER................ > LITHOSOLV............... > MASKSCRUB............. > NANO1....................... > NANO2....................... > NIKON....................... problem. theta motor drift > NIKON 9..................... > SVGCOAT................... > SVGCOAT2................. > SVGDEV...................... > SVGDEV2..................... > ULTRATECH............... > ULTRATECH2.............. > UVCURE....................... > WBMISCRES................. > YES OVEN..................... > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Tue Oct 4 08:10:39 2005 From: martinez at snf.stanford.edu (mike martinez) Date: Tue, 04 Oct 2005 08:10:39 -0700 Subject: litho 10/4/05 In-Reply-To: <41DF26F0.F6475255@snf.stanford.edu> References: <41DF26F0.F6475255@snf.stanford.edu> Message-ID: <43429B6F.1030602@snf.stanford.edu> > Litho Tools Status > 10/4/05 > > AFM......................... > BLUE M................... > DEKTAK CLEAN..... > DEKTAK AU............ > DNS.......................... > ELLIPSOMETER...... > ELP1......................... > ELP2......................... > EVALIGN.................. > EVIMPRINT.............. > EVBOND...................problem. possible bad turbo pump > FUSION..................... > LAURELL L............... > LAURELL R............... > HEADWAY2............... > KARLSUSS................. > KARLSUSS2............... > KSBONDER................ > LITHOSOLV............... > MASKSCRUB............. > NANO1....................... > NANO2....................... > NIKON....................... problem. theta motor drift > NIKON 9..................... > SVGCOAT................... > SVGCOAT2................. > SVGDEV...................... > SVGDEV2..................... > ULTRATECH............... > ULTRATECH2.............. > UVCURE....................... > WBMISCRES................. > YES OVEN..................... > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Wed Oct 5 08:04:05 2005 From: martinez at snf.stanford.edu (mike martinez) Date: Wed, 05 Oct 2005 08:04:05 -0700 Subject: litho 10/5/05 In-Reply-To: <41DF26F0.F6475255@snf.stanford.edu> References: <41DF26F0.F6475255@snf.stanford.edu> Message-ID: <4343EB65.9090203@snf.stanford.edu> > Litho Tools Status > 10/5/05 > > AFM......................... > BLUE M................... > DEKTAK CLEAN..... > DEKTAK AU............ > DNS.......................... > ELLIPSOMETER...... > ELP1......................... > ELP2......................... > EVALIGN.................. > EVIMPRINT.............. > EVBOND................... problem. possible bad turbo pump > FUSION..................... > LAURELL L............... > LAURELL R............... > HEADWAY2............... > KARLSUSS................. > KARLSUSS2............... > KSBONDER................ > LITHOSOLV............... > MASKSCRUB............. > NANO1....................... > NANO2....................... > NIKON......................problem. theta motor drift > NIKON 9..................... > SVGCOAT................... > SVGCOAT2................. > SVGDEV...................... > SVGDEV2..................... > ULTRATECH............... > ULTRATECH2.............. > UVCURE....................... > WBMISCRES................. > YES OVEN..................... > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Thu Oct 6 08:08:51 2005 From: martinez at snf.stanford.edu (mike martinez) Date: Thu, 06 Oct 2005 08:08:51 -0700 Subject: litho 10/6/05 In-Reply-To: <41DF26F0.F6475255@snf.stanford.edu> References: <41DF26F0.F6475255@snf.stanford.edu> Message-ID: <43453E03.1020404@snf.stanford.edu> > Litho Tools Status > 10/6/05 > > AFM......................... > BLUE M................... > DEKTAK CLEAN..... > DEKTAK AU............ > DNS.......................... > ELLIPSOMETER...... > ELP1......................... > ELP2......................... > EVALIGN.................. > EVIMPRINT.............. > EVBOND...................problem. possible bad turbo pump > FUSION..................... > LAURELL L............... > LAURELL R............... > HEADWAY2............... > KARLSUSS................. > KARLSUSS2............... > KSBONDER................ > LITHOSOLV............... > MASKSCRUB............. > NANO1....................... > NANO2....................... > NIKON....................... problem. theta motor drift > NIKON 9..................... > SVGCOAT................... > SVGCOAT2................. > SVGDEV...................... > SVGDEV2..................... > ULTRATECH............... > ULTRATECH2.............. > UVCURE....................... > WBMISCRES................. > YES OVEN..................... > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Fri Oct 7 08:09:36 2005 From: martinez at snf.stanford.edu (mike martinez) Date: Fri, 07 Oct 2005 08:09:36 -0700 Subject: litho 10/7/05 In-Reply-To: <41DF26F0.F6475255@snf.stanford.edu> References: <41DF26F0.F6475255@snf.stanford.edu> Message-ID: <43468FB0.9050502@snf.stanford.edu> > Litho Tools Status > 10/7/05 > > AFM......................... > BLUE M................... > DEKTAK CLEAN..... > DEKTAK AU............ > DNS.......................... > ELLIPSOMETER...... > ELP1......................... > ELP2......................... > EVALIGN.................. > EVIMPRINT.............. > EVBOND...................shutdown. removed turbo pump. > FUSION..................... > LAURELL L............... > LAURELL R............... > HEADWAY2............... > KARLSUSS................. > KARLSUSS2............... > KSBONDER................ > LITHOSOLV............... > MASKSCRUB............. > NANO1....................... > NANO2....................... > NIKON....................... problem. theta motor drift > NIKON 9..................... > SVGCOAT................... > SVGCOAT2................. > SVGDEV...................... > SVGDEV2..................... > ULTRATECH............... > ULTRATECH2.............. > UVCURE....................... > WBMISCRES................. > YES OVEN..................... > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From hebangdian at 21cn.com Sun Oct 9 09:06:33 2005 From: hebangdian at 21cn.com (=?GB2312?B?bG9uZ21pbmdodWk=?=) Date: Mon, 10 Oct 2005 00:06:33 +0800 Subject: =?GB2312?B?QW4gb3BlbiBsZXR0ZXIgdG8gQW1lcmljYW4gUHJlc2lkZW50IE1yLiBCdXNoICC+tNbCw8C5+tfczbOyvMqyz8jJ+rXEuau/qtDF?= Message-ID: <0012351706$25075387$41856086@21cn.com> An open letter to American President Mr. Bush ?????????????? DuPont Co. and its CEO Holliday are transnational scoundrel! We request the American government actions to intensify the law enforcement strength to protect intellectual property rights,force DuPont to carry out it?s voluntarily promised obligations in the agreement. Hello, my respectable President Mr. Bush: The fact that DuPont declined to fulfill the agreement has been presented to you for several times via president at whitehouse.gov; As a result, president at whitehouse.gov sent back three letters containing the following same contents on the behalf of Mr. President in Sep 2004:?Thank you for e-mailing President Bush. Your ideas and comments are very important to him.? My ?ideas and comments? are as follows: it is verified by Mr. Huang with adequate facts and irrefutable legal evidences that DuPont must disburse Mr. Huang patent fee, license fee or equivalent ?Utter Compensation? fee and DuPont?s persistent refusal to disburse these fees infringes upon the intellectual property rights of Mr. Huang. president at whitehouse.gov mentioned ?are very important to him.? I don?t dare to unduly surmise the meaning of ?very important? to Mr. President; However, according to my humble opinions, there exits the following ?important?: on the one hand, respectable Mr. President, the American Government led by Mr. President as well as the great American people bitterly hate the predation of the intellectual property rights of others through brazen means such as stealing, shameless acts; in contrast, DuPont is committing such brazen and shameless deals; on the other hand, the number of your country?s intellectual property rights in a variety of fields is far in excess of that of any nations in the world and suffers greatly from rights infringement. Therefore, your government always reserves no efforts in urging other nations to intensify the law enforcement strength to protect your country?s intellectual property rights. However, while your government reserves no efforts in urging the Chinese government to intensify the law enforcement strength to protect your country?s intellectual property rights and receives your ?more encouraged? praise, DuPont is infringing the intellectual property rights of Mr. Huang through various extremely brazen and shameless means, which constitutes an extremely bad signal to the governments and public of other nations in the world, a extremely ?good? model for current and potential thieves of intellectual property rights, an enormous damage to your government protection of your country?s intellectual property rights, and a tremendous humiliation to your country?s lofty status in the world. For the sake of the glory of the great American people and the reputation of a legion of American corporations, in order to safeguard your country?s lofty status in the world and protect the intellectual property rights of your country and other nations in the world, we humbly request you and your government to prevent DuPont?s such extremely brazen infringement and even seizure behaviors, and force DuPont to carry out it?s voluntarily promised obligations in the agreement. We firmly believe that the United State is not a country that shields and connives at rascals and the American government is not a government that shields and connives at rascals; Under the instruction of our respectable Mr. President and the American government, the rascal of DuPont shall be aware of shame and be able to turn into a normal corporation by giving up shameless behaviors. Due to the adequate evidences, the clear-cut rights and obligations of both parties of DuPont and Mr. Huang, and simple legal relations, the infringement of the intellectual property rights of Mr. Huang by DuPont can be absolutely prevented and DuPont will surely disburse Mr. Huang patent fee, license fee or equivalent ?Utter Compensation? fee as long as your government intensifies the law enforcement strength to protect intellectual property rights as well. With best regards! Annex: Heartfelt thanks for your reading my E-mail and your mail of attention to this matter. I would like to make some replenishment concerning the matter, for you to judge and decide. I Abstract 1. At the request of Du Pont, Mr. Huang has for 10 times submitted written technical materials to Du Pont from April 1993 to 1994, for expert group of Du Pont to conduct feasibility analysis. 2. On February 22, 1995, Dr Robert F Sklar, Technology Transfer Licensing Manager of DuPont arrived in Shanghai in China, to ?sign many agreements? with Mr. Huang. Mr. Huang insisted DuPont examines samples first before signs any agreement. However, as samples were still in the process of purification at the time, no agreements were signed then. 3. On March 28, 1995, Mr. Huang sent the first batch of samples to Du Pont by post. 4. On September 7, 1995, Mr. Huang received ?Biological Evaluation Agreement? (1995 Agreement) sent by Du Pont, requiring Mr. Huang to sign this agreement and again provide samples. Mr. Huang signed the agreement and sent second batch of samples as requested by DuPont. DuPont admit in Article 5 of the ?1995 Agreement? that Mr. Huang will be entitled to claim patent and licensing fees. DuPont states in Article 8 of the ?1995 Agreement? that Mr. Huang may not cooperate with any universities or enterprises in any form before and after signing of this agreement (for this reason, Mr. Huang has refused cooperation request of several companies). 5. On September 10, 1998, DuPont sent a letter to Mr. Huang, asking for third batch of samples. 6. In 1999, DuPont carried out a month-long insecticide screening on the third batch of samples (in fact, it has carried out weeds killing test and mould killing test in the meantime), and required to keep all these tests a secret. 7. On June 8, 2000, DuPont sent a letter saying it was not interested in samples provided by Mr. Huang, and refused to pay Mr. Huang patent and licensing fees. 8.The mail signed by DuPont on June 2th, 2005, threaten Mr.Huang ,and prevent Mr.Huang send the E-mail. ?????????????? ?????????????????????! ???????????????????????????????????????? ????????????? ?????????????????president at whitehouse.gov?????president at whitehouse.gov?? 2004?9??????????????????????Thank you for e-mailing President Bush. Your ideas and comments are very important to him.????ideas and comments????????????????????????????????????????????????????????????????????????????????president at whitehouse.gov??are very important to him.? ?very important??????????????????????????????important? ? 1.????????????????????????????????????????????????????????????????????????? 2.??????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????? ???????????????????????????????????????????????????????????????????????????????????????????????????? ???????????????????????????????????????????????? ???????????????????????????????????????????????? ????????? ???????????????????????????????????????????????? ????????????????????????????????????????????? ???????????????????????????????????????????????? ??????????????????????????????????????????????????????????????????? ?? ??????? ??????SXF 2005.09.17.23?59 (??? ?? 1. ?1993?4???1994??????????????????10???????????????? ?????? 2. 1995?2?22?????????????Sklar?? ?E.I.DU PONT DE NEMOURS AND COMPANY Robert F. Sklar Ph. D. Manager,Technology Transfer Licensing)??????????????????????????????????????????????????????????? 3 1995?3?28???????????????? 4. 1995?9?7????????????BIOLOGICAL EVALUATION AGREEMENT?1995???)?????????????????????????????????????????????????1995?????5??????????????????????????????????1995?????8?????????????????????????????????????????? ???? 5. 1998?9?10?????????????????? 6 1999????????????????Insecticide Screening??????????????????????????????????????? 7. 2000?6?8?????????????????,????????????????? 8.2005.06.02. ???????????????-??????????E-mail? -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Mon Oct 10 08:05:28 2005 From: martinez at snf.stanford.edu (mike martinez) Date: Mon, 10 Oct 2005 08:05:28 -0700 Subject: litho 10/10/05 In-Reply-To: <41DF26F0.F6475255@snf.stanford.edu> References: <41DF26F0.F6475255@snf.stanford.edu> Message-ID: <434A8338.9030206@snf.stanford.edu> > Litho Tools Status > 10/10/05 > > AFM......................... > BLUE M................... > DEKTAK CLEAN..... > DEKTAK AU............ > DNS.......................... > ELLIPSOMETER...... > ELP1......................... > ELP2......................... > EVALIGN.................. > EVIMPRINT.............. > EVBOND...................shutdown. turbo out for repair > FUSION..................... > LAURELL L............... > LAURELL R............... > HEADWAY2............... > KARLSUSS................. > KARLSUSS2............... > KSBONDER................ > LITHOSOLV............... > MASKSCRUB............. > NANO1....................... > NANO2....................... > NIKON....................... problem. theta motor drift > NIKON 9..................... > SVGCOAT................... > SVGCOAT2................. > SVGDEV...................... > SVGDEV2..................... > ULTRATECH............... > ULTRATECH2.............. > UVCURE....................... > WBMISCRES................. > YES OVEN..................... > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Tue Oct 11 05:36:39 2005 From: nanotech at nsti.org (NSTI) Date: Tue, 11 Oct 2005 05:36:39 -0700 Subject: Nano Impact Summit DC - Discounted Registration Deadline Today Message-ID: An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Tue Oct 11 08:08:42 2005 From: martinez at snf.stanford.edu (mike martinez) Date: Tue, 11 Oct 2005 08:08:42 -0700 Subject: litho 10/11/05 In-Reply-To: <41DF26F0.F6475255@snf.stanford.edu> References: <41DF26F0.F6475255@snf.stanford.edu> Message-ID: <434BD57A.9000707@snf.stanford.edu> > Litho Tools Status > 10/11/05 > > AFM......................... > BLUE M................... > DEKTAK CLEAN..... > DEKTAK AU............ > DNS.......................... > ELLIPSOMETER...... > ELP1......................... > ELP2......................... > EVALIGN.................. > EVIMPRINT.............. > EVBOND...................shutdown. turbo out for repair > FUSION..................... > LAURELL L............... > LAURELL R............... > HEADWAY2............... > KARLSUSS................. > KARLSUSS2............... > KSBONDER................ > LITHOSOLV............... > MASKSCRUB............. > NANO1....................... > NANO2....................... > NIKON....................... problem. reticle loading > NIKON 9..................... > SVGCOAT................... > SVGCOAT2................. > SVGDEV...................... > SVGDEV2..................... > ULTRATECH............... > ULTRATECH2.............. problem. won't load reticles > UVCURE....................... > WBMISCRES................. > YES OVEN..................... > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Wed Oct 12 08:11:15 2005 From: martinez at snf.stanford.edu (mike martinez) Date: Wed, 12 Oct 2005 08:11:15 -0700 Subject: litho 10/12/05 In-Reply-To: <41DF26F0.F6475255@snf.stanford.edu> References: <41DF26F0.F6475255@snf.stanford.edu> Message-ID: <434D2793.60807@snf.stanford.edu> > Litho Tools Status > 10/12/05 > > AFM......................... > BLUE M................... > DEKTAK CLEAN..... > DEKTAK AU............ > DNS.......................... > ELLIPSOMETER...... > ELP1......................... > ELP2......................... > EVALIGN.................. > EVIMPRINT.............. > EVBOND...................shutdown. turbo pump out for repair > FUSION..................... > LAURELL L............... > LAURELL R............... > HEADWAY2............... > KARLSUSS................. > KARLSUSS2............... > KSBONDER................ > LITHOSOLV............... > MASKSCRUB............. > NANO1....................... > NANO2....................... > NIKON....................... problem. theta motor drift > NIKON 9..................... > SVGCOAT................... > SVGCOAT2................. > SVGDEV...................... > SVGDEV2..................... > ULTRATECH............... > ULTRATECH2.............. > UVCURE....................... > WBMISCRES................. > YES OVEN..................... > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From Vilanova at snf.stanford.edu Thu Oct 13 08:57:40 2005 From: Vilanova at snf.stanford.edu (Eddy VIlanova) Date: Thu, 13 Oct 2005 08:57:40 -0700 Subject: Litho AM Daily Report 10/13/05 Message-ID: <434E83F4.9020804@snf.stanford.edu> > > Litho Tools Status > 10/13/05 > > AFM......................... > BLUE M................... > DEKTAK CLEAN..... > DEKTAK AU............ > DNS.......................... > ELLIPSOMETER...... > ELP1......................... > ELP2......................... > EVALIGN.................. > EVIMPRINT.............. > EVBOND...................shutdown. turbo pump out for repair > FUSION..................... > LAURELL L............... > LAURELL R............... > HEADWAY2............... > KARLSUSS................. > KARLSUSS2............... > KSBONDER................ > LITHOSOLV............... > MASKSCRUB............. > NANO1....................... > NANO2....................... > NIKON....................... problem. theta motor drift > NIKON 9..................... > SVGCOAT................... > SVGCOAT2................. > SVGDEV...................... > SVGDEV2..................... > ULTRATECH............... > ULTRATECH2.............. > UVCURE....................... > WBMISCRES................. > YES OVEN..................... > > From Vilanova at snf.stanford.edu Thu Oct 13 11:06:41 2005 From: Vilanova at snf.stanford.edu (Eddy VIlanova) Date: Thu, 13 Oct 2005 11:06:41 -0700 Subject: HOTPLATES AND OVENS MONTHLY CALIBRATON 10/13/05 Message-ID: <434EA231.404@snf.stanford.edu> *HOTPLATES AND OVENS MONTHLY CALIBRATION 10/13/05 svgcoat vp hp set point 125C - actual reading 125.4C post bake set point 90C - actual reading 89.2C svgcoat2 vp hp set point 125C - actual reading 125.9C post bake set point 90C - actual reading 89.2C svgdev post bake set point 110C - actual reading 109.4.C svgdev2 post bake set point 110C - actual reading 109.8C 90C hot plate actaul reading 92.0C 115C hot plate actual reading 115.5C DATA HOTPLATES #1 set 115C - actual 115.3C #2 set 115C - actual 115.8C #3 set 114C - actual 112.5C #4 set 123C - actual 126.1C OVENS 150C singe - actual 149.0C 110C post - actual 109.5C 90Cpre - actual 90.6C* From martinez at snf.stanford.edu Fri Oct 14 08:08:44 2005 From: martinez at snf.stanford.edu (mike martinez) Date: Fri, 14 Oct 2005 08:08:44 -0700 Subject: litho 10/14 In-Reply-To: <41DF26F0.F6475255@snf.stanford.edu> References: <41DF26F0.F6475255@snf.stanford.edu> Message-ID: <434FC9FC.5090009@snf.stanford.edu> > Litho Tools Status > 10/14/05 > > AFM......................... > BLUE M................... > DEKTAK CLEAN..... > DEKTAK AU............ > DNS.......................... > ELLIPSOMETER...... > ELP1......................... > ELP2......................... > EVALIGN.................. > EVIMPRINT.............. > EVBOND...................shutdown. turbo out for repair > FUSION..................... > LAURELL L............... > LAURELL R............... > HEADWAY2............... > KARLSUSS................. > KARLSUSS2............... > KSBONDER................ > LITHOSOLV............... > MASKSCRUB............. > NANO1....................... > NANO2....................... > NIKON....................... problem. theta drift > NIKON 9..................... > SVGCOAT................... > SVGCOAT2................. > SVGDEV...................... > SVGDEV2..................... > ULTRATECH............... > ULTRATECH2.............. > UVCURE....................... > WBMISCRES................. > YES OVEN..................... > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Fri Oct 14 08:31:35 2005 From: nanotech at nsti.org (Nano World News) Date: Fri, 14 Oct 2005 08:31:35 -0700 Subject: Nano World News October 2005 Message-ID: An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Mon Oct 17 08:12:06 2005 From: martinez at snf.stanford.edu (mike martinez) Date: Mon, 17 Oct 2005 08:12:06 -0700 Subject: litho 10/17/05 In-Reply-To: <41DF26F0.F6475255@snf.stanford.edu> References: <41DF26F0.F6475255@snf.stanford.edu> Message-ID: <4353BF46.5040004@snf.stanford.edu> > Litho Tools Status > 10/17/05 > > AFM......................... > BLUE M................... > DEKTAK CLEAN..... > DEKTAK AU............ > DNS.......................... > ELLIPSOMETER...... > ELP1......................... > ELP2......................... > EVALIGN.................. > EVIMPRINT.............. > EVBOND...................shutdown. turbo pump out for repair > FUSION..................... > LAURELL L............... > LAURELL R............... > HEADWAY2............... > KARLSUSS................. > KARLSUSS2............... > KSBONDER................ > LITHOSOLV............... > MASKSCRUB............. > NANO1....................... > NANO2....................... > NIKON....................... problem. theta motor drift > NIKON 9..................... > SVGCOAT................... > SVGCOAT2................. > SVGDEV...................... > SVGDEV2..................... > ULTRATECH............... > ULTRATECH2.............. > UVCURE....................... > WBMISCRES................. > YES OVEN..................... > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Tue Oct 18 08:08:17 2005 From: martinez at snf.stanford.edu (mike martinez) Date: Tue, 18 Oct 2005 08:08:17 -0700 Subject: litho 10/18 In-Reply-To: <41DF26F0.F6475255@snf.stanford.edu> References: <41DF26F0.F6475255@snf.stanford.edu> Message-ID: <43550FE1.7000209@snf.stanford.edu> > Litho Tools Status > 10/18/05 > > AFM......................... > BLUE M................... problem. won't reach 400 degrees > DEKTAK CLEAN..... > DEKTAK AU............ > DNS.......................... > ELLIPSOMETER...... > ELP1......................... > ELP2......................... > EVALIGN.................. > EVIMPRINT.............. > EVBOND................... shutdown. turbo repair > FUSION..................... > LAURELL L............... > LAURELL R............... > HEADWAY2............... > KARLSUSS................. > KARLSUSS2............... > KSBONDER................ > LITHOSOLV............... > MASKSCRUB............. > NANO1....................... > NANO2....................... > NIKON....................... problem. theta motor drift > NIKON 9..................... > SVGCOAT................... > SVGCOAT2................. > SVGDEV...................... > SVGDEV2..................... > ULTRATECH............... > ULTRATECH2.............. > UVCURE....................... > WBMISCRES................. > YES OVEN..................... > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Wed Oct 19 08:07:43 2005 From: martinez at snf.stanford.edu (mike martinez) Date: Wed, 19 Oct 2005 08:07:43 -0700 Subject: litho 10/19/05 In-Reply-To: <41DF26F0.F6475255@snf.stanford.edu> References: <41DF26F0.F6475255@snf.stanford.edu> Message-ID: <4356613F.4050909@snf.stanford.edu> > Litho Tools Status > 10/19/05 > > AFM......................... > BLUE M................... problem. unable to reach high temp > DEKTAK CLEAN..... > DEKTAK AU............ > DNS.......................... > ELLIPSOMETER...... > ELP1......................... > ELP2......................... > EVALIGN.................. > EVIMPRINT.............. > EVBOND...................shutdown. turbo out for repair. ETA 10/21 > FUSION..................... > LAURELL L............... > LAURELL R............... > HEADWAY2............... > KARLSUSS................. > KARLSUSS2............... > KSBONDER................ > LITHOSOLV............... > MASKSCRUB............. > NANO1....................... > NANO2....................... > NIKON....................... problem. theta motor drift. > NIKON 9..................... > SVGCOAT................... > SVGCOAT2................. > SVGDEV...................... > SVGDEV2..................... > ULTRATECH............... > ULTRATECH2.............. > UVCURE....................... > WBMISCRES................. > YES OVEN..................... > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Thu Oct 20 08:14:05 2005 From: martinez at snf.stanford.edu (mike martinez) Date: Thu, 20 Oct 2005 08:14:05 -0700 Subject: litho 10/20/05 In-Reply-To: <41DF26F0.F6475255@snf.stanford.edu> References: <41DF26F0.F6475255@snf.stanford.edu> Message-ID: <4357B43D.7020702@snf.stanford.edu> > Litho Tools Status > 10/20/05 > > AFM......................... > BLUE M................... > DEKTAK CLEAN..... > DEKTAK AU............ > DNS.......................... > ELLIPSOMETER...... > ELP1......................... > ELP2......................... > EVALIGN.................. > EVIMPRINT.............. > EVBOND...................shutdown. turbo repair. eta 10/21 > FUSION..................... > LAURELL L............... > LAURELL R............... > HEADWAY2............... > KARLSUSS................. problem. control panel locked up > KARLSUSS2............... > KSBONDER................ > LITHOSOLV............... > MASKSCRUB............. > NANO1....................... > NANO2....................... > NIKON....................... problem. theta motor drift > NIKON 9..................... > SVGCOAT................... > SVGCOAT2................. > SVGDEV...................... > SVGDEV2..................... > ULTRATECH............... > ULTRATECH2.............. > UVCURE....................... > WBMISCRES................. > YES OVEN..................... > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Fri Oct 21 08:13:44 2005 From: martinez at snf.stanford.edu (mike martinez) Date: Fri, 21 Oct 2005 08:13:44 -0700 Subject: litho 10/21 In-Reply-To: <41DF26F0.F6475255@snf.stanford.edu> References: <41DF26F0.F6475255@snf.stanford.edu> Message-ID: <435905A8.2090304@snf.stanford.edu> > Litho Tools Status > 10/21/05 > > AFM......................... > BLUE M................... > DEKTAK CLEAN..... > DEKTAK AU............ > DNS.......................... > ELLIPSOMETER...... > ELP1......................... > ELP2......................... > EVALIGN.................. > EVIMPRINT.............. > EVBOND...................shutdown. turbo repair should be completed today > FUSION..................... > LAURELL L............... > LAURELL R............... > HEADWAY2............... > KARLSUSS................. > KARLSUSS2............... > KSBONDER................ > LITHOSOLV............... > MASKSCRUB............. > NANO1....................... > NANO2....................... > NIKON....................... problem. theta motor drift > NIKON 9..................... > SVGCOAT................... > SVGCOAT2................. > SVGDEV...................... > SVGDEV2..................... > ULTRATECH............... > ULTRATECH2.............. > UVCURE....................... > WBMISCRES................. > YES OVEN..................... > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Mon Oct 24 08:07:29 2005 From: martinez at snf.stanford.edu (mike martinez) Date: Mon, 24 Oct 2005 08:07:29 -0700 Subject: litho 10/24 In-Reply-To: <41DF26F0.F6475255@snf.stanford.edu> References: <41DF26F0.F6475255@snf.stanford.edu> Message-ID: <435CF8B1.1050706@snf.stanford.edu> > Litho Tools Status > 10/24/05 > > AFM......................... > BLUE M................... > DEKTAK CLEAN..... > DEKTAK AU............ > DNS.......................... > ELLIPSOMETER...... > ELP1......................... > ELP2......................... > EVALIGN.................. > EVIMPRINT.............. > EVBOND...................shutdown. turbo repair. eta 10/25 > FUSION..................... > LAURELL L............... > LAURELL R............... > HEADWAY2............... > KARLSUSS................. > KARLSUSS2............... > KSBONDER................ > LITHOSOLV............... > MASKSCRUB............. > NANO1....................... > NANO2....................... > NIKON....................... problem. thets motor drift > NIKON 9..................... > SVGCOAT................... > SVGCOAT2................. > SVGDEV...................... > SVGDEV2..................... > ULTRATECH............... > ULTRATECH2.............. > UVCURE....................... > WBMISCRES................. > YES OVEN..................... > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Tue Oct 25 08:14:37 2005 From: martinez at snf.stanford.edu (mike martinez) Date: Tue, 25 Oct 2005 08:14:37 -0700 Subject: litho 10/25 In-Reply-To: <41DF26F0.F6475255@snf.stanford.edu> References: <41DF26F0.F6475255@snf.stanford.edu> Message-ID: <435E4BDD.5060005@snf.stanford.edu> > Litho Tools Status > 10/25/05 > > AFM......................... > BLUE M................... > DEKTAK CLEAN..... > DEKTAK AU............ > DNS.......................... > ELLIPSOMETER...... > ELP1......................... > ELP2......................... > EVALIGN.................. > EVIMPRINT.............. > EVBOND...................shutdown. turbo repair > FUSION..................... > LAURELL L............... > LAURELL R............... > HEADWAY2............... > KARLSUSS................. > KARLSUSS2............... > KSBONDER................ > LITHOSOLV............... > MASKSCRUB............. > NANO1....................... > NANO2....................... > NIKON....................... problem. theta intermittent drift > > NIKON 9..................... > SVGCOAT................... > SVGCOAT2................. > SVGDEV...................... > SVGDEV2..................... > ULTRATECH............... > ULTRATECH2.............. > UVCURE....................... > WBMISCRES................. > YES OVEN..................... > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Tue Oct 25 08:02:04 2005 From: nanotech at nsti.org (Nanotech 2006) Date: Tue, 25 Oct 2005 08:02:04 -0700 Subject: NSTI-Nanotech 2006 - 2nd Announcement and Call for Papers Message-ID: Nanotech 2006 May 7-11, Boston, Massachusetts http://www.nsti.org/Nanotech2006 The 9th annual NSTI Nanotech 2006, the premier nanotechnology conference and trade show in the U.S., will take place May 7-11, 2006 at the Hynes Convention Center, Boston, Massachusetts. The largest and most comprehensive nanotechnology event in the U.S., Nanotech 2006 will host over 3,000 attendees, 300 exhibitors, 600 business & research presentations, and 100+ Nanotech Ventures. Over 100 early stage nanotech companies will be presenting within the Nanotech 2006 Early Stage Company and Investment Review. The Nanotech 2006 Scientific Program is the most respected nano event in the U.S., with endorsements from top U.S. and European societies, research agencies and fortune 500 companies. This year?s program is schedule with special industry focused symposia. These include sessions on the Health Care, Biotechnology, Materials, Surface sciences, Transportation, Personal Care, Energy, Food, Environmental, Electronics, Telecommunications, Computational, Displays & Optics, Design & Modeling, Polymers, and Coatings sectors. Workshops and Ventures events this year include: Nano Industrial Impact Workshop ? Sunday May 7 One-Day Intensive Program to educate participants in the current state of the art in a range of nanotechnologies and impacted industries. All courses are presented by leading experts in their respective fields. Nanotech Ventures Emerging Company Review ? May 8 - 10 Join the Nanotech Ventures community in participating in the world's largest nanotechnology venture forum. 50 Early Stage Companies Presenting in most every high-tech industrial sector. Clean & Controlled Environments ? May 8 - 10 Industry leading event for cleanrooms, contamination management and controlled environments for small particles. Conference and Symposia this year include: Nanoscale Electronics & Microsystems ? Nano Electronics & Photonics ? Nano Fabrication ? MEMS & NEMS ? Sensors & Systems ? Micro & Nano Fluidics ? MSM - Modeling Microsystems ? WCM - Compact Modeling Nanoscale Materials & Technologies ? Nanostructured Materials & Devices ? Soft Nanotechnologies & Applications ? Polymer Nanotechnology ? Carbon Nano Structures & Devices ? Nano Particles & Applications ? Composites & Interfaces ? Energy Technologies & Applications ? Environment & Society ? ICCN - Nanoscale Modeling ? Nanoscale Characterization Nanotech in Life Science & Medicine ? Bio Nano Materials & Tissue Engineering ? Bio Sensors & Diagnostics ? Biomarkers & Nanoparticles ? Cancer Diagnostics, Imaging & Treatment ? Cellular & Molecular Dynamics ? Computational & Modeling - ICCN ? Drug Delivery & Therapeutics ? Imaging ? Nano Medicine ? Nanotech to Neurology Clean & Controlled Environments ? Clean & Controlled Environments Business, Partnering, Policy ? Investment, Licensing, Partnering ? Initiatives, Education & Policy Nanotech 2006 May 7-11, Boston, Massachusetts http://www.nsti.org/Nanotech2006 --- You are currently subscribed to nanotech as: litho at snf.stanford.edu To unsubscribe send a blank email to leave-nanotech-6212050U at spirit.sparklist.com -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Wed Oct 26 08:23:15 2005 From: martinez at snf.stanford.edu (mike martinez) Date: Wed, 26 Oct 2005 08:23:15 -0700 Subject: litho 10/26 In-Reply-To: <41DF26F0.F6475255@snf.stanford.edu> References: <41DF26F0.F6475255@snf.stanford.edu> Message-ID: <435F9F63.6030903@snf.stanford.edu> > Litho Tools Status > 10/26/05 > > AFM......................... > BLUE M................... > DEKTAK CLEAN..... > DEKTAK AU............ > DNS.......................... > ELLIPSOMETER...... > ELP1......................... > ELP2......................... > EVALIGN.................. > EVIMPRINT.............. > EVBOND...................shutdown. turbo pump install today > FUSION..................... > LAURELL L............... > LAURELL R............... > HEADWAY2............... > KARLSUSS................. > KARLSUSS2............... > KSBONDER................ > LITHOSOLV............... > MASKSCRUB............. > NANO1....................... > NANO2....................... > NIKON....................... problem. intermittent theta drift > NIKON 9..................... > SVGCOAT................... > SVGCOAT2................. > SVGDEV...................... > SVGDEV2..................... > ULTRATECH............... > ULTRATECH2.............. > UVCURE....................... > WBMISCRES................. > YES OVEN..................... > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Thu Oct 27 08:14:52 2005 From: martinez at snf.stanford.edu (mike martinez) Date: Thu, 27 Oct 2005 08:14:52 -0700 Subject: litho 10/27 In-Reply-To: <41DF26F0.F6475255@snf.stanford.edu> References: <41DF26F0.F6475255@snf.stanford.edu> Message-ID: <4360EEEC.7020406@snf.stanford.edu> > Litho Tools Status > 10/27/05 > > AFM......................... > BLUE M................... > DEKTAK CLEAN..... > DEKTAK AU............ shutdown. stylus not moving > DNS.......................... > ELLIPSOMETER...... > ELP1......................... > ELP2......................... > EVALIGN.................. > EVIMPRINT.............. > EVBOND................... > FUSION..................... > LAURELL L............... > LAURELL R............... > HEADWAY2............... > KARLSUSS................. > KARLSUSS2............... > KSBONDER................ > LITHOSOLV............... > MASKSCRUB............. > NANO1....................... > NANO2....................... > NIKON....................... problem. intermittent theta motor drift > NIKON 9..................... > SVGCOAT................... > SVGCOAT2................. > SVGDEV...................... > SVGDEV2..................... > ULTRATECH............... > ULTRATECH2.............. > UVCURE....................... > WBMISCRES................. > YES OVEN..................... > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Fri Oct 28 08:10:35 2005 From: martinez at snf.stanford.edu (mike martinez) Date: Fri, 28 Oct 2005 08:10:35 -0700 Subject: litho 10/28 In-Reply-To: <41DF26F0.F6475255@snf.stanford.edu> References: <41DF26F0.F6475255@snf.stanford.edu> Message-ID: <43623F6B.8030206@snf.stanford.edu> > Litho Tools Status > 10/28/05 > > AFM......................... > BLUE M................... > DEKTAK CLEAN..... > DEKTAK AU............ > DNS.......................... > ELLIPSOMETER...... > ELP1......................... > ELP2......................... > EVALIGN.................. > EVIMPRINT.............. > EVBOND................... > FUSION..................... > LAURELL L............... > LAURELL R............... > HEADWAY2............... > KARLSUSS................. > KARLSUSS2............... > KSBONDER................ > LITHOSOLV............... > MASKSCRUB............. > NANO1....................... > NANO2....................... > NIKON......................problem. intermittent theta motor drift > NIKON 9..................... > SVGCOAT................... > SVGCOAT2................. > SVGDEV...................... > SVGDEV2..................... > ULTRATECH............... > ULTRATECH2.............. > UVCURE....................... > WBMISCRES................. > YES OVEN..................... > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Fri Oct 28 14:42:23 2005 From: martinez at snf.stanford.edu (mike martinez) Date: Fri, 28 Oct 2005 14:42:23 -0700 Subject: svg resist thickness check Message-ID: <43629B3F.50504@snf.stanford.edu> SVGCOAT T C B L R 1.0um 10425 10354 10419 10505 10442 1.6um 16318 16282 16290 16316 16337 7.0um 70592 70290 70471 70426 70586 SVGCOAT2 1.0um 10225 10191 10208 10222 10208 1.6um 16900 16901 16897 16903 16883 3.0um 29656 29536 29705 29660 29724 From martinez at snf.stanford.edu Mon Oct 31 08:06:19 2005 From: martinez at snf.stanford.edu (mike martinez) Date: Mon, 31 Oct 2005 08:06:19 -0800 Subject: lith 10/31 In-Reply-To: <41DF26F0.F6475255@snf.stanford.edu> References: <41DF26F0.F6475255@snf.stanford.edu> Message-ID: <436640FB.6010605@snf.stanford.edu> > Litho Tools Status > 10/31/05 > > AFM......................... > BLUE M................... > DEKTAK CLEAN..... > DEKTAK AU............ > DNS.......................... > ELLIPSOMETER...... > ELP1......................... > ELP2......................... > EVALIGN.................. > EVIMPRINT.............. > EVBOND................... > FUSION..................... > LAURELL L............... > LAURELL R............... > HEADWAY2............... > KARLSUSS................. > KARLSUSS2............... > KSBONDER................ > LITHOSOLV............... > MASKSCRUB............. > NANO1....................... > NANO2....................... > NIKON......................problem. intermittent theta motor drift. > NIKON 9..................... > SVGCOAT................... > SVGCOAT2................. > SVGDEV...................... > SVGDEV2..................... > ULTRATECH............... > ULTRATECH2.............. > UVCURE....................... > WBMISCRES................. > YES OVEN..................... > > -------------- next part -------------- An HTML attachment was scrubbed... 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