litho 10/4/05

mike martinez martinez at snf.stanford.edu
Tue Oct 4 08:10:39 PDT 2005


> Litho Tools Status
> 10/4/05
>
> AFM.........................
> BLUE M...................
> DEKTAK CLEAN.....
> DEKTAK AU............
> DNS..........................
> ELLIPSOMETER......
> ELP1.........................
> ELP2.........................
> EVALIGN..................
> EVIMPRINT..............
> EVBOND...................problem. possible bad turbo pump
> FUSION.....................
> LAURELL L...............
> LAURELL R...............
> HEADWAY2...............
> KARLSUSS.................
> KARLSUSS2...............
> KSBONDER................
> LITHOSOLV...............
> MASKSCRUB.............
> NANO1.......................
> NANO2.......................
> NIKON....................... problem. theta motor drift
> NIKON 9.....................
> SVGCOAT...................
> SVGCOAT2.................
> SVGDEV......................
> SVGDEV2.....................
> ULTRATECH...............
> ULTRATECH2..............
> UVCURE.......................
> WBMISCRES.................
> YES OVEN.....................
>  
>

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