Litho AM Daily report 4/4/06
Eddy VIlanova
Vilanova at snf.stanford.edu
Tue Apr 4 08:10:00 PDT 2006
**********************Litho Tools Status*************
4/04/06******
AFM.........................
BLUE M...................
DEKTAK CLEAN.....
DEKTAK AU............
DNS..........................
ELLIPSOMETER............. Problem - Software Initialization Error.
ELP1.........................
ELP2.........................
EVALIGN...................
EVIMPRINT..............
EVBOND.................... .
FUSION.....................
LAURELL L...............
LAURELL R...............
HEADWAY2...............
KARLSUSS.................
KARLSUSS2................
KSBONDER................
LITHOSOLV...............
MASKSCRUB.............
NANO1.......................
NANO2.......................
NIKON.........................
NIKON 9.....................
SVGCOAT....................
SVGCOAT2....................
SVGDEV......................
SVGDEV2......................
ULTRATECH............... ..
ULTRATECH2.............. . .
UVCURE.......................
WBMISCRES.................
YES OVEN......................
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