Litho Am Daily Report 4/5/06
Eddy VIlanova
Vilanova at snf.stanford.edu
Wed Apr 5 07:01:20 PDT 2006
**********************Litho Tools Status*************
4/05/06******
AFM.........................
BLUE M...................
DEKTAK CLEAN.....
DEKTAK AU............
DNS..........................
ELLIPSOMETER............. Problem - Initialization Error.
ELP1.........................
ELP2.........................
EVALIGN...................
EVIMPRINT..............
EVBOND.................... .
FUSION.....................
LAURELL L...............
LAURELL R...............
HEADWAY2...............
KARLSUSS.................
KARLSUSS2................
KSBONDER................
LITHOSOLV...............
MASKSCRUB.............
NANO1.......................
NANO2.......................
NIKON.........................
NIKON 9.....................
SVGCOAT....................
SVGCOAT2....................
SVGDEV......................
SVGDEV2......................
ULTRATECH............... ..
ULTRATECH2.............. . .
UVCURE.......................
WBMISCRES.................
YES OVEN......................
More information about the litho
mailing list