Litho AM Daily Report 4/17/06

Eddy VIlanova Vilanova at snf.stanford.edu
Mon Apr 17 11:26:59 PDT 2006


*Litho Tools Status*
*04/17/06*
* *
*AFM.........................Problem-Scan Issues.*
*BLUE M...................*
*DEKTAK CLEAN.........*
*DEKTAK AU............*
*DNS..........................*
*ELLIPSOMETER......*
*ELP1.........................*
*ELP2.........................*
*EVALIGN..................*
*EVIMPRINT..............*
*EVBOND.................Problem-Not reaching Voltage*
*FUSION.....................*
*LAURELL L...............*
*LAURELL R...............*
*HEADWAY2...............*
*KARLSUSS.................*
*KARLSUSS2...............*
*KSBONDER................*
*LITHOSOLV...............*
*MASKSCRUB.............*
*NANO1.......................*
*NANO2.......................*
*NIKON.......................*
*NIKON 9.....................*
*SVGCOAT...................*
*SVGCOAT2.................*
*SVGDEV......................*
*SVGDEV2.....................*
*ULTRATECH...............*
*ULTRATECH2..............*
*UVCURE.......................*
*WBMISCRES.................*
*YES OVEN.....................*
* *
 




More information about the litho mailing list