Litho Am Daily Report 4/28/06

Eddy VIlanova Vilanova at snf.stanford.edu
Fri Apr 28 09:32:26 PDT 2006


************************Litho Tools Status*************
		  4/28/06
AFM.........................Problem  -Scanner sent out for repair :-( .
BLUE M...................
DEKTAK CLEAN.....
DEKTAK AU............
DNS..........................
ELLIPSOMETER............. .  
ELP1.........................
ELP2.........................
EVALIGN...................
EVIMPRINT..............
EVBOND.................... .  
FUSION.....................
LAURELL L...............
LAURELL R...............Shutdown - Controller Out for Repair. . 
HEADWAY2...............
KARLSUSS.................
KARLSUSS2................ 
KSBONDER................
LITHOSOLV...............
MASKSCRUB.............
NANO1.......................
NANO2.......................
NIKON.........................
NIKON 9.....................
SVGCOAT....................Shutdown - Bad  CPU Board, Waiting for Replacement. 
SVGCOAT2.................... 
SVGDEV......................
SVGDEV2......................
ULTRATECH............... ..
ULTRATECH2.............. . .
UVCURE.......................
WBMISCRES.................
YES OVEN......................*







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