Litho AM Daily Report 8/11/06

Vilanova vilanova at stanford.edu
Fri Aug 11 08:31:05 PDT 2006


***********Litho Tools Status**
08/11/06

 

AFM.....................
BLUE M................... 
DEKTAK CLEAN............Shutdown - Broken Scan Needle Stage.
DEKTAK AU...............
DNS.....................
ELLIPSOMETER............
ELP1....................
ELP2....................
EVALIGN.................
EVIMPRINT...............
EVBOND...................
FUSION..................
LAURELL L...............
LAURELL R............... 
HEADWAY2................
KARLSUSS................
KARLSUSS2...............
KSBONDER................
LITHOSOLV...............
MASKSCRUB...............
NANO1...................Problem-System Measure Fail for Program # 10 .
NANO2...................
NIKON...................
NIKON 9.................
SVGCOAT.................
SVGCOAT2................
SVGDEV..................
SVGDEV2.................
ULTRATECH...............
ULTRATECH2..............Shutdown.
UVCURE..................
WBMISCRES...............
YES OVEN................






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