Litho AM Daily Report 8/23/06

Vilanova vilanova at stanford.edu
Wed Aug 23 07:46:09 PDT 2006


***********Litho Tools Status**
08/23/06

 

AFM.....................
BLUE M................... 
DEKTAK CLEAN.............
DEKTAK AU...............
DNS.....................
ELLIPSOMETER............
ELP1....................
ELP2....................
EVALIGN.................
EVIMPRINT................ 
EVBOND...................
FUSION..................
LAURELL L...............
LAURELL R............... 
HEADWAY2................
KARLSUSS................
KARLSUSS2...............
KSBONDER................
LITHOSOLV...............
MASKSCRUB...............
NANO1...................Problem- power supply been repair.
NANO2...................
NIKON...................
NIKON 9.................
SVGCOAT.................Problem- missing factory settings 4 Controller for thick Resist Prog. #4,#6 
SVGCOAT2................
SVGDEV..................
SVGDEV2.................
ULTRATECH...............
ULTRATECH2..............Shutdown.
UVCURE..................
WBMISCRES...............
YES OVEN................






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