Litho AM Daily Report 8/24/06

Vilanova vilanova at stanford.edu
Thu Aug 24 07:21:18 PDT 2006


***********Litho Tools Status**
08/24/06

 

AFM.....................
BLUE M.................. 
DEKTAK CLEAN............
DEKTAK AU...............
DNS.....................
ELLIPSOMETER............
ELP1....................
ELP2....................
EVALIGN.................
EVIMPRINT............... 
EVBOND..................
FUSION..................
LAURELL L...............
LAURELL R............... 
HEADWAY2................
KARLSUSS................
KARLSUSS2...............
KSBONDER................
LITHOSOLV...............
MASKSCRUB...............
NANO2...................
NIKON...................Problem-Flat Finder not working Properly.
NIKON 9.................Problem-Problem with Wafer Loader.
SVGCOAT.................
SVGCOAT2................
SVGDEV..................
SVGDEV2.................
ULTRATECH...............problem-Wafer Tilt Problem.
ULTRATECH2..............Shutdown.
UVCURE..................
WBMISCRES...............
YES OVEN................







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