Litho Am Daily Report 6/25/06

Vilanova vilanova at stanford.edu
Fri Aug 25 06:59:08 PDT 2006


***********Litho Tools Status**
08/25/06

 

AFM.....................
BLUE M.................. 
DEKTAK CLEAN............
DEKTAK AU...............
DNS.....................
ELLIPSOMETER............
ELP1....................
ELP2....................
EVALIGN.................
EVIMPRINT............... 
EVBOND..................Problem-Electrod Need to be replace.
FUSION..................
LAURELL L...............
LAURELL R............... 
HEADWAY2................
KARLSUSS................
KARLSUSS2...............
KSBONDER................
LITHOSOLV...............
MASKSCRUB...............
NANO2...................
NIKON...................Shutdown-Flat Finder not working Properly 4 LTO wafers.
NIKON 9.................
SVGCOAT.................
SVGCOAT2................
SVGDEV..................
SVGDEV2.................
ULTRATECH................
ULTRATECH2..............Shutdown.
UVCURE..................
WBMISCRES...............
YES OVEN................









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