Litho AM Daily report 8/28/06

Vilanova vilanova at stanford.edu
Mon Aug 28 08:07:33 PDT 2006


Litho Tools Status                         

08/28/06

 

AFM.....................

BLUE M..................

DEKTAK CLEAN............

DEKTAK AU...............

DNS.....................

ELLIPSOMETER............

ELP1....................

ELP2....................

EVALIGN.................

EVIMPRINT...............

EVBOND.................ShutDown- Lamp replacing on progress. 

FUSION..................

LAURELL L...............

LAURELL R............... 

HEADWAY2................

KARLSUSS................

KARLSUSS2...............

KSBONDER................

LITHOSOLV...............

MASKSCRUB...............

NANO1...................

NANO2...................

NIKON....................Shutdown- Mask Loader Error. 

NIKON 9.................

SVGCOAT.................

SVGCOAT2................

SVGDEV..................

SVGDEV2.................Problem.Intermitent Indexer Sensor Error.

ULTRATECH...............

ULTRATECH2 ............. 

UVCURE..................

WBMISCRES...............

YES OVEN................**

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